9/6/2012	9:15:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/6/2012	9:15:30 AM	Recipe started at 9:15 AM
9/6/2012	9:15:30 AM	Helium valve closed
9/6/2012	9:15:30 AM	H2 valve closed
9/6/2012	9:15:30 AM	BCl3 valve closed
9/6/2012	9:15:30 AM	PH3 valve closed
9/6/2012	9:15:30 AM	SiCl4 pre valve closed
9/6/2012	9:15:30 AM	SiCl4 post valve closed
9/6/2012	9:15:30 AM	Main Vac valve closed
9/6/2012	9:15:30 AM	Bypass valve closed
9/6/2012	9:15:30 AM	Bubbler valve closed
9/6/2012	9:15:30 AM	Helium MFC set to  0.000000
9/6/2012	9:15:30 AM	H2 MFC set to  0.000000
9/6/2012	9:15:30 AM	BCl3 MFC set to  0.000000
9/6/2012	9:15:30 AM	PH3 MFC set to  0.000000
9/6/2012	9:15:30 AM	SiCl4 MFC set to  0.000000
9/6/2012	9:15:30 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	9:15:30 AM	Tube furnace set to 0
9/6/2012	9:15:33 AM	H2 valve closed
9/6/2012	9:15:33 AM	BCl3 valve closed
9/6/2012	9:15:33 AM	PH3 valve closed
9/6/2012	9:15:33 AM	SiCl4 pre valve closed
9/6/2012	9:15:33 AM	SiCl4 post valve closed
9/6/2012	9:15:33 AM	Main Vac valve closed
9/6/2012	9:15:33 AM	Bypass valve closed
9/6/2012	9:15:33 AM	Bubbler valve closed
9/6/2012	9:15:33 AM	Helium valve opened
9/6/2012	9:15:33 AM	Helium MFC set to  500.000000
9/6/2012	9:15:33 AM	H2 MFC set to  0.000000
9/6/2012	9:15:33 AM	BCl3 MFC set to  0.000000
9/6/2012	9:15:33 AM	PH3 MFC set to  0.000000
9/6/2012	9:15:33 AM	SiCl4 MFC set to  0.000000
9/6/2012	9:15:33 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	9:15:33 AM	Tube furnace set to 0
9/6/2012	9:16:41 AM	Helium valve closed
9/6/2012	9:16:41 AM	H2 valve closed
9/6/2012	9:16:41 AM	BCl3 valve closed
9/6/2012	9:16:41 AM	PH3 valve closed
9/6/2012	9:16:41 AM	SiCl4 pre valve closed
9/6/2012	9:16:41 AM	SiCl4 post valve closed
9/6/2012	9:16:41 AM	Main Vac valve closed
9/6/2012	9:16:41 AM	Bypass valve closed
9/6/2012	9:16:41 AM	Bubbler valve closed
9/6/2012	9:16:41 AM	Helium MFC set to  0.000000
9/6/2012	9:16:41 AM	H2 MFC set to  0.000000
9/6/2012	9:16:41 AM	BCl3 MFC set to  0.000000
9/6/2012	9:16:41 AM	PH3 MFC set to  0.000000
9/6/2012	9:16:41 AM	SiCl4 MFC set to  0.000000
9/6/2012	9:16:41 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	9:16:41 AM	Tube furnace set to 0
9/6/2012	9:16:42 AM	Run finished at 9:16 AM
9/6/2012	9:16:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/6/2012	9:44:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/6/2012	9:44:01 AM	Recipe started at 9:44 AM
9/6/2012	9:44:01 AM	Helium valve closed
9/6/2012	9:44:01 AM	H2 valve closed
9/6/2012	9:44:01 AM	BCl3 valve closed
9/6/2012	9:44:01 AM	PH3 valve closed
9/6/2012	9:44:01 AM	SiCl4 pre valve closed
9/6/2012	9:44:01 AM	SiCl4 post valve closed
9/6/2012	9:44:01 AM	Main Vac valve closed
9/6/2012	9:44:01 AM	Bubbler valve closed
9/6/2012	9:44:01 AM	Bypass valve opened
9/6/2012	9:44:01 AM	Helium MFC set to  0.000000
9/6/2012	9:44:01 AM	H2 MFC set to  0.000000
9/6/2012	9:44:01 AM	BCl3 MFC set to  0.000000
9/6/2012	9:44:01 AM	PH3 MFC set to  0.000000
9/6/2012	9:44:01 AM	SiCl4 MFC set to  0.000000
9/6/2012	9:44:01 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	9:44:01 AM	Tube furnace set to 0
9/6/2012	9:45:21 AM	Helium valve closed
9/6/2012	9:45:22 AM	H2 valve closed
9/6/2012	9:45:22 AM	BCl3 valve closed
9/6/2012	9:45:22 AM	PH3 valve closed
9/6/2012	9:45:22 AM	SiCl4 pre valve closed
9/6/2012	9:45:22 AM	SiCl4 post valve closed
9/6/2012	9:45:22 AM	Main Vac valve closed
9/6/2012	9:45:22 AM	Bubbler valve closed
9/6/2012	9:45:22 AM	Bypass valve opened
9/6/2012	9:45:22 AM	Helium MFC set to  0.000000
9/6/2012	9:45:22 AM	H2 MFC set to  0.000000
9/6/2012	9:45:22 AM	BCl3 MFC set to  0.000000
9/6/2012	9:45:22 AM	PH3 MFC set to  0.000000
9/6/2012	9:45:22 AM	SiCl4 MFC set to  0.000000
9/6/2012	9:45:22 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	9:45:22 AM	Tube furnace set to 0
9/6/2012	9:46:22 AM	Helium valve closed
9/6/2012	9:46:22 AM	H2 valve closed
9/6/2012	9:46:22 AM	BCl3 valve closed
9/6/2012	9:46:22 AM	PH3 valve closed
9/6/2012	9:46:22 AM	SiCl4 pre valve closed
9/6/2012	9:46:22 AM	SiCl4 post valve closed
9/6/2012	9:46:22 AM	Bypass valve closed
9/6/2012	9:46:22 AM	Bubbler valve closed
9/6/2012	9:46:22 AM	Main Vac valve opened
9/6/2012	9:46:22 AM	Helium MFC set to  0.000000
9/6/2012	9:46:22 AM	H2 MFC set to  0.000000
9/6/2012	9:46:22 AM	BCl3 MFC set to  0.000000
9/6/2012	9:46:22 AM	PH3 MFC set to  0.000000
9/6/2012	9:46:22 AM	SiCl4 MFC set to  0.000000
9/6/2012	9:46:22 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	9:46:22 AM	Tube furnace set to 0
9/6/2012	9:46:23 AM	Run finished at 9:46 AM
9/6/2012	9:46:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/6/2012	9:48:59 AM	Tube furnace set to 150
9/6/2012	10:17:33 AM	Recipe started at 10:17 AM
9/6/2012	10:17:33 AM	Helium valve closed
9/6/2012	10:17:33 AM	H2 valve closed
9/6/2012	10:17:33 AM	BCl3 valve closed
9/6/2012	10:17:33 AM	PH3 valve closed
9/6/2012	10:17:33 AM	SiCl4 pre valve closed
9/6/2012	10:17:33 AM	SiCl4 post valve closed
9/6/2012	10:17:33 AM	Bypass valve closed
9/6/2012	10:17:33 AM	Bubbler valve closed
9/6/2012	10:17:33 AM	Main Vac valve opened
9/6/2012	10:17:33 AM	Helium MFC set to  0.000000
9/6/2012	10:17:33 AM	H2 MFC set to  0.000000
9/6/2012	10:17:33 AM	BCl3 MFC set to  0.000000
9/6/2012	10:17:33 AM	PH3 MFC set to  0.000000
9/6/2012	10:17:33 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:17:33 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:17:34 AM	Tube furnace set to 150
9/6/2012	10:17:38 AM	H2 valve closed
9/6/2012	10:17:38 AM	BCl3 valve closed
9/6/2012	10:17:38 AM	PH3 valve closed
9/6/2012	10:17:38 AM	SiCl4 pre valve closed
9/6/2012	10:17:38 AM	SiCl4 post valve closed
9/6/2012	10:17:38 AM	Bypass valve closed
9/6/2012	10:17:38 AM	Bubbler valve closed
9/6/2012	10:17:38 AM	Helium valve opened
9/6/2012	10:17:38 AM	Main Vac valve opened
9/6/2012	10:17:38 AM	Helium MFC set to  20.000000
9/6/2012	10:17:38 AM	H2 MFC set to  0.000000
9/6/2012	10:17:38 AM	BCl3 MFC set to  0.000000
9/6/2012	10:17:38 AM	PH3 MFC set to  0.000000
9/6/2012	10:17:38 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:17:38 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:17:39 AM	Tube furnace set to 150
9/6/2012	10:18:09 AM	Helium valve closed
9/6/2012	10:18:09 AM	H2 valve closed
9/6/2012	10:18:09 AM	BCl3 valve closed
9/6/2012	10:18:09 AM	PH3 valve closed
9/6/2012	10:18:09 AM	SiCl4 pre valve closed
9/6/2012	10:18:09 AM	SiCl4 post valve closed
9/6/2012	10:18:09 AM	Bypass valve closed
9/6/2012	10:18:09 AM	Bubbler valve closed
9/6/2012	10:18:09 AM	Main Vac valve opened
9/6/2012	10:18:09 AM	Helium MFC set to  0.000000
9/6/2012	10:18:09 AM	H2 MFC set to  0.000000
9/6/2012	10:18:09 AM	BCl3 MFC set to  0.000000
9/6/2012	10:18:09 AM	PH3 MFC set to  0.000000
9/6/2012	10:18:09 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:18:09 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:18:09 AM	Tube furnace set to 150
9/6/2012	10:18:39 AM	H2 valve closed
9/6/2012	10:18:39 AM	BCl3 valve closed
9/6/2012	10:18:39 AM	PH3 valve closed
9/6/2012	10:18:39 AM	SiCl4 pre valve closed
9/6/2012	10:18:39 AM	SiCl4 post valve closed
9/6/2012	10:18:39 AM	Bypass valve closed
9/6/2012	10:18:39 AM	Bubbler valve closed
9/6/2012	10:18:39 AM	Helium valve opened
9/6/2012	10:18:39 AM	Main Vac valve opened
9/6/2012	10:18:39 AM	Helium MFC set to  20.000000
9/6/2012	10:18:39 AM	H2 MFC set to  0.000000
9/6/2012	10:18:39 AM	BCl3 MFC set to  0.000000
9/6/2012	10:18:39 AM	PH3 MFC set to  0.000000
9/6/2012	10:18:39 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:18:39 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:18:39 AM	Tube furnace set to 150
9/6/2012	10:19:09 AM	Helium valve closed
9/6/2012	10:19:09 AM	H2 valve closed
9/6/2012	10:19:09 AM	BCl3 valve closed
9/6/2012	10:19:09 AM	PH3 valve closed
9/6/2012	10:19:09 AM	SiCl4 pre valve closed
9/6/2012	10:19:09 AM	SiCl4 post valve closed
9/6/2012	10:19:09 AM	Bypass valve closed
9/6/2012	10:19:09 AM	Bubbler valve closed
9/6/2012	10:19:09 AM	Main Vac valve opened
9/6/2012	10:19:09 AM	Helium MFC set to  0.000000
9/6/2012	10:19:09 AM	H2 MFC set to  0.000000
9/6/2012	10:19:09 AM	BCl3 MFC set to  0.000000
9/6/2012	10:19:09 AM	PH3 MFC set to  0.000000
9/6/2012	10:19:09 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:19:09 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:19:09 AM	Tube furnace set to 150
9/6/2012	10:19:39 AM	H2 valve closed
9/6/2012	10:19:39 AM	BCl3 valve closed
9/6/2012	10:19:39 AM	PH3 valve closed
9/6/2012	10:19:39 AM	SiCl4 pre valve closed
9/6/2012	10:19:39 AM	SiCl4 post valve closed
9/6/2012	10:19:39 AM	Bypass valve closed
9/6/2012	10:19:39 AM	Bubbler valve closed
9/6/2012	10:19:39 AM	Helium valve opened
9/6/2012	10:19:39 AM	Main Vac valve opened
9/6/2012	10:19:39 AM	Helium MFC set to  20.000000
9/6/2012	10:19:39 AM	H2 MFC set to  0.000000
9/6/2012	10:19:39 AM	BCl3 MFC set to  0.000000
9/6/2012	10:19:39 AM	PH3 MFC set to  0.000000
9/6/2012	10:19:39 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:19:39 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:19:40 AM	Tube furnace set to 150
9/6/2012	10:20:10 AM	Helium valve closed
9/6/2012	10:20:10 AM	H2 valve closed
9/6/2012	10:20:10 AM	BCl3 valve closed
9/6/2012	10:20:10 AM	PH3 valve closed
9/6/2012	10:20:10 AM	SiCl4 pre valve closed
9/6/2012	10:20:10 AM	SiCl4 post valve closed
9/6/2012	10:20:10 AM	Bypass valve closed
9/6/2012	10:20:10 AM	Bubbler valve closed
9/6/2012	10:20:10 AM	Main Vac valve opened
9/6/2012	10:20:10 AM	Helium MFC set to  0.000000
9/6/2012	10:20:10 AM	H2 MFC set to  0.000000
9/6/2012	10:20:10 AM	BCl3 MFC set to  0.000000
9/6/2012	10:20:10 AM	PH3 MFC set to  0.000000
9/6/2012	10:20:10 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:20:10 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:20:10 AM	Tube furnace set to 150
9/6/2012	10:20:40 AM	H2 valve closed
9/6/2012	10:20:40 AM	BCl3 valve closed
9/6/2012	10:20:40 AM	PH3 valve closed
9/6/2012	10:20:40 AM	SiCl4 pre valve closed
9/6/2012	10:20:40 AM	SiCl4 post valve closed
9/6/2012	10:20:40 AM	Bypass valve closed
9/6/2012	10:20:40 AM	Bubbler valve closed
9/6/2012	10:20:40 AM	Helium valve opened
9/6/2012	10:20:40 AM	Main Vac valve opened
9/6/2012	10:20:40 AM	Helium MFC set to  20.000000
9/6/2012	10:20:40 AM	H2 MFC set to  0.000000
9/6/2012	10:20:40 AM	BCl3 MFC set to  0.000000
9/6/2012	10:20:40 AM	PH3 MFC set to  0.000000
9/6/2012	10:20:40 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:20:40 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:20:40 AM	Tube furnace set to 150
9/6/2012	10:21:10 AM	Helium valve closed
9/6/2012	10:21:10 AM	H2 valve closed
9/6/2012	10:21:10 AM	BCl3 valve closed
9/6/2012	10:21:10 AM	PH3 valve closed
9/6/2012	10:21:10 AM	SiCl4 pre valve closed
9/6/2012	10:21:10 AM	SiCl4 post valve closed
9/6/2012	10:21:10 AM	Bypass valve closed
9/6/2012	10:21:10 AM	Bubbler valve closed
9/6/2012	10:21:10 AM	Main Vac valve opened
9/6/2012	10:21:10 AM	Helium MFC set to  0.000000
9/6/2012	10:21:10 AM	H2 MFC set to  0.000000
9/6/2012	10:21:10 AM	BCl3 MFC set to  0.000000
9/6/2012	10:21:10 AM	PH3 MFC set to  0.000000
9/6/2012	10:21:10 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:21:10 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:21:10 AM	Tube furnace set to 150
9/6/2012	10:21:40 AM	H2 valve closed
9/6/2012	10:21:40 AM	BCl3 valve closed
9/6/2012	10:21:40 AM	PH3 valve closed
9/6/2012	10:21:40 AM	SiCl4 pre valve closed
9/6/2012	10:21:40 AM	SiCl4 post valve closed
9/6/2012	10:21:40 AM	Bypass valve closed
9/6/2012	10:21:40 AM	Bubbler valve closed
9/6/2012	10:21:40 AM	Helium valve opened
9/6/2012	10:21:40 AM	Main Vac valve opened
9/6/2012	10:21:40 AM	Helium MFC set to  20.000000
9/6/2012	10:21:40 AM	H2 MFC set to  0.000000
9/6/2012	10:21:40 AM	BCl3 MFC set to  0.000000
9/6/2012	10:21:40 AM	PH3 MFC set to  0.000000
9/6/2012	10:21:40 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:21:40 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:21:40 AM	Tube furnace set to 150
9/6/2012	10:22:10 AM	Helium valve closed
9/6/2012	10:22:10 AM	H2 valve closed
9/6/2012	10:22:10 AM	BCl3 valve closed
9/6/2012	10:22:10 AM	PH3 valve closed
9/6/2012	10:22:11 AM	SiCl4 pre valve closed
9/6/2012	10:22:11 AM	SiCl4 post valve closed
9/6/2012	10:22:11 AM	Bypass valve closed
9/6/2012	10:22:11 AM	Bubbler valve closed
9/6/2012	10:22:11 AM	Main Vac valve opened
9/6/2012	10:22:11 AM	Helium MFC set to  0.000000
9/6/2012	10:22:11 AM	H2 MFC set to  0.000000
9/6/2012	10:22:11 AM	BCl3 MFC set to  0.000000
9/6/2012	10:22:11 AM	PH3 MFC set to  0.000000
9/6/2012	10:22:11 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:22:11 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:22:11 AM	Tube furnace set to 150
9/6/2012	10:22:41 AM	H2 valve closed
9/6/2012	10:22:41 AM	BCl3 valve closed
9/6/2012	10:22:41 AM	PH3 valve closed
9/6/2012	10:22:41 AM	SiCl4 pre valve closed
9/6/2012	10:22:41 AM	SiCl4 post valve closed
9/6/2012	10:22:41 AM	Bypass valve closed
9/6/2012	10:22:41 AM	Bubbler valve closed
9/6/2012	10:22:41 AM	Helium valve opened
9/6/2012	10:22:41 AM	Main Vac valve opened
9/6/2012	10:22:41 AM	Helium MFC set to  20.000000
9/6/2012	10:22:41 AM	H2 MFC set to  0.000000
9/6/2012	10:22:41 AM	BCl3 MFC set to  0.000000
9/6/2012	10:22:41 AM	PH3 MFC set to  0.000000
9/6/2012	10:22:41 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:22:41 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:22:41 AM	Tube furnace set to 150
9/6/2012	10:23:11 AM	Helium valve closed
9/6/2012	10:23:11 AM	H2 valve closed
9/6/2012	10:23:11 AM	BCl3 valve closed
9/6/2012	10:23:11 AM	PH3 valve closed
9/6/2012	10:23:11 AM	SiCl4 pre valve closed
9/6/2012	10:23:11 AM	SiCl4 post valve closed
9/6/2012	10:23:11 AM	Bypass valve closed
9/6/2012	10:23:11 AM	Bubbler valve closed
9/6/2012	10:23:11 AM	Main Vac valve opened
9/6/2012	10:23:11 AM	Helium MFC set to  0.000000
9/6/2012	10:23:11 AM	H2 MFC set to  0.000000
9/6/2012	10:23:11 AM	BCl3 MFC set to  0.000000
9/6/2012	10:23:11 AM	PH3 MFC set to  0.000000
9/6/2012	10:23:11 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:23:11 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:23:11 AM	Tube furnace set to 150
9/6/2012	10:23:41 AM	H2 valve closed
9/6/2012	10:23:41 AM	BCl3 valve closed
9/6/2012	10:23:41 AM	PH3 valve closed
9/6/2012	10:23:41 AM	SiCl4 pre valve closed
9/6/2012	10:23:41 AM	SiCl4 post valve closed
9/6/2012	10:23:41 AM	Bypass valve closed
9/6/2012	10:23:41 AM	Bubbler valve closed
9/6/2012	10:23:41 AM	Helium valve opened
9/6/2012	10:23:41 AM	Main Vac valve opened
9/6/2012	10:23:41 AM	Helium MFC set to  20.000000
9/6/2012	10:23:41 AM	H2 MFC set to  0.000000
9/6/2012	10:23:41 AM	BCl3 MFC set to  0.000000
9/6/2012	10:23:41 AM	PH3 MFC set to  0.000000
9/6/2012	10:23:41 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:23:41 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:23:41 AM	Tube furnace set to 150
9/6/2012	10:24:11 AM	Helium valve closed
9/6/2012	10:24:11 AM	H2 valve closed
9/6/2012	10:24:11 AM	BCl3 valve closed
9/6/2012	10:24:11 AM	PH3 valve closed
9/6/2012	10:24:11 AM	SiCl4 pre valve closed
9/6/2012	10:24:11 AM	SiCl4 post valve closed
9/6/2012	10:24:11 AM	Bypass valve closed
9/6/2012	10:24:11 AM	Bubbler valve closed
9/6/2012	10:24:11 AM	Main Vac valve opened
9/6/2012	10:24:11 AM	Helium MFC set to  0.000000
9/6/2012	10:24:11 AM	H2 MFC set to  0.000000
9/6/2012	10:24:11 AM	BCl3 MFC set to  0.000000
9/6/2012	10:24:11 AM	PH3 MFC set to  0.000000
9/6/2012	10:24:11 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:24:11 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:24:12 AM	Tube furnace set to 150
9/6/2012	10:24:42 AM	H2 valve closed
9/6/2012	10:24:42 AM	BCl3 valve closed
9/6/2012	10:24:42 AM	PH3 valve closed
9/6/2012	10:24:42 AM	SiCl4 pre valve closed
9/6/2012	10:24:42 AM	SiCl4 post valve closed
9/6/2012	10:24:42 AM	Bypass valve closed
9/6/2012	10:24:42 AM	Bubbler valve closed
9/6/2012	10:24:42 AM	Helium valve opened
9/6/2012	10:24:42 AM	Main Vac valve opened
9/6/2012	10:24:42 AM	Helium MFC set to  20.000000
9/6/2012	10:24:42 AM	H2 MFC set to  0.000000
9/6/2012	10:24:42 AM	BCl3 MFC set to  0.000000
9/6/2012	10:24:42 AM	PH3 MFC set to  0.000000
9/6/2012	10:24:42 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:24:42 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:24:42 AM	Tube furnace set to 150
9/6/2012	10:25:12 AM	Helium valve closed
9/6/2012	10:25:12 AM	H2 valve closed
9/6/2012	10:25:12 AM	BCl3 valve closed
9/6/2012	10:25:12 AM	PH3 valve closed
9/6/2012	10:25:12 AM	SiCl4 pre valve closed
9/6/2012	10:25:12 AM	SiCl4 post valve closed
9/6/2012	10:25:12 AM	Bypass valve closed
9/6/2012	10:25:12 AM	Bubbler valve closed
9/6/2012	10:25:12 AM	Main Vac valve opened
9/6/2012	10:25:12 AM	Helium MFC set to  0.000000
9/6/2012	10:25:12 AM	H2 MFC set to  0.000000
9/6/2012	10:25:12 AM	BCl3 MFC set to  0.000000
9/6/2012	10:25:12 AM	PH3 MFC set to  0.000000
9/6/2012	10:25:12 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:25:12 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:25:12 AM	Tube furnace set to 150
9/6/2012	10:25:42 AM	H2 valve closed
9/6/2012	10:25:42 AM	BCl3 valve closed
9/6/2012	10:25:42 AM	PH3 valve closed
9/6/2012	10:25:42 AM	SiCl4 pre valve closed
9/6/2012	10:25:42 AM	SiCl4 post valve closed
9/6/2012	10:25:42 AM	Bypass valve closed
9/6/2012	10:25:42 AM	Bubbler valve closed
9/6/2012	10:25:42 AM	Helium valve opened
9/6/2012	10:25:42 AM	Main Vac valve opened
9/6/2012	10:25:42 AM	Helium MFC set to  20.000000
9/6/2012	10:25:42 AM	H2 MFC set to  0.000000
9/6/2012	10:25:42 AM	BCl3 MFC set to  0.000000
9/6/2012	10:25:42 AM	PH3 MFC set to  0.000000
9/6/2012	10:25:42 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:25:42 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:25:42 AM	Tube furnace set to 150
9/6/2012	10:26:12 AM	Helium valve closed
9/6/2012	10:26:12 AM	H2 valve closed
9/6/2012	10:26:12 AM	BCl3 valve closed
9/6/2012	10:26:12 AM	PH3 valve closed
9/6/2012	10:26:12 AM	SiCl4 pre valve closed
9/6/2012	10:26:12 AM	SiCl4 post valve closed
9/6/2012	10:26:12 AM	Bypass valve closed
9/6/2012	10:26:12 AM	Bubbler valve closed
9/6/2012	10:26:12 AM	Main Vac valve opened
9/6/2012	10:26:12 AM	Helium MFC set to  0.000000
9/6/2012	10:26:12 AM	H2 MFC set to  0.000000
9/6/2012	10:26:12 AM	BCl3 MFC set to  0.000000
9/6/2012	10:26:12 AM	PH3 MFC set to  0.000000
9/6/2012	10:26:12 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:26:12 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:26:13 AM	Tube furnace set to 150
9/6/2012	10:26:43 AM	H2 valve closed
9/6/2012	10:26:43 AM	BCl3 valve closed
9/6/2012	10:26:43 AM	PH3 valve closed
9/6/2012	10:26:43 AM	SiCl4 pre valve closed
9/6/2012	10:26:43 AM	SiCl4 post valve closed
9/6/2012	10:26:43 AM	Bypass valve closed
9/6/2012	10:26:43 AM	Bubbler valve closed
9/6/2012	10:26:43 AM	Helium valve opened
9/6/2012	10:26:43 AM	Main Vac valve opened
9/6/2012	10:26:43 AM	Helium MFC set to  20.000000
9/6/2012	10:26:43 AM	H2 MFC set to  0.000000
9/6/2012	10:26:43 AM	BCl3 MFC set to  0.000000
9/6/2012	10:26:43 AM	PH3 MFC set to  0.000000
9/6/2012	10:26:43 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:26:43 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:26:43 AM	Tube furnace set to 150
9/6/2012	10:27:13 AM	Helium valve closed
9/6/2012	10:27:13 AM	H2 valve closed
9/6/2012	10:27:13 AM	BCl3 valve closed
9/6/2012	10:27:13 AM	PH3 valve closed
9/6/2012	10:27:13 AM	SiCl4 pre valve closed
9/6/2012	10:27:13 AM	SiCl4 post valve closed
9/6/2012	10:27:13 AM	Bypass valve closed
9/6/2012	10:27:13 AM	Bubbler valve closed
9/6/2012	10:27:13 AM	Main Vac valve opened
9/6/2012	10:27:13 AM	Helium MFC set to  0.000000
9/6/2012	10:27:13 AM	H2 MFC set to  0.000000
9/6/2012	10:27:13 AM	BCl3 MFC set to  0.000000
9/6/2012	10:27:13 AM	PH3 MFC set to  0.000000
9/6/2012	10:27:13 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:27:13 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:27:13 AM	Tube furnace set to 150
9/6/2012	10:27:14 AM	Run finished at 10:27 AM
9/6/2012	10:45:49 AM	Helium MFC set to  20.000000
9/6/2012	10:45:50 AM	Helium valve opened
9/6/2012	10:48:59 AM	Helium valve closed
9/6/2012	10:49:39 AM	Main Vac valve closed
9/6/2012	10:49:53 AM	Main Vac valve opened
9/6/2012	10:49:54 AM	Helium valve opened
9/6/2012	10:50:59 AM	Helium valve closed
9/6/2012	10:52:03 AM	Recipe started at 10:52 AM
9/6/2012	10:52:03 AM	Helium valve closed
9/6/2012	10:52:03 AM	H2 valve closed
9/6/2012	10:52:03 AM	BCl3 valve closed
9/6/2012	10:52:03 AM	PH3 valve closed
9/6/2012	10:52:03 AM	SiCl4 pre valve closed
9/6/2012	10:52:03 AM	SiCl4 post valve closed
9/6/2012	10:52:03 AM	Main Vac valve closed
9/6/2012	10:52:03 AM	Bypass valve closed
9/6/2012	10:52:03 AM	Bubbler valve closed
9/6/2012	10:52:03 AM	Helium MFC set to  0.000000
9/6/2012	10:52:03 AM	H2 MFC set to  0.000000
9/6/2012	10:52:03 AM	BCl3 MFC set to  0.000000
9/6/2012	10:52:03 AM	PH3 MFC set to  0.000000
9/6/2012	10:52:03 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:52:03 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:52:03 AM	Tube furnace set to 0
9/6/2012	10:52:06 AM	Helium valve closed
9/6/2012	10:52:06 AM	BCl3 valve closed
9/6/2012	10:52:06 AM	PH3 valve closed
9/6/2012	10:52:06 AM	SiCl4 pre valve closed
9/6/2012	10:52:06 AM	SiCl4 post valve closed
9/6/2012	10:52:06 AM	Main Vac valve closed
9/6/2012	10:52:06 AM	Bypass valve closed
9/6/2012	10:52:06 AM	Bubbler valve closed
9/6/2012	10:52:06 AM	H2 valve opened
9/6/2012	10:52:06 AM	Helium MFC set to  0.000000
9/6/2012	10:52:06 AM	H2 MFC set to  500.000000
9/6/2012	10:52:06 AM	BCl3 MFC set to  0.000000
9/6/2012	10:52:06 AM	PH3 MFC set to  0.000000
9/6/2012	10:52:06 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:52:06 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:52:06 AM	Tube furnace set to 50
9/6/2012	10:53:18 AM	Helium valve closed
9/6/2012	10:53:18 AM	BCl3 valve closed
9/6/2012	10:53:18 AM	PH3 valve closed
9/6/2012	10:53:18 AM	SiCl4 pre valve closed
9/6/2012	10:53:18 AM	SiCl4 post valve closed
9/6/2012	10:53:18 AM	Main Vac valve closed
9/6/2012	10:53:18 AM	Bypass valve closed
9/6/2012	10:53:18 AM	H2 valve opened
9/6/2012	10:53:18 AM	Bubbler valve opened
9/6/2012	10:53:18 AM	Helium MFC set to  0.000000
9/6/2012	10:53:18 AM	H2 MFC set to  500.000000
9/6/2012	10:53:18 AM	BCl3 MFC set to  0.000000
9/6/2012	10:53:18 AM	PH3 MFC set to  0.000000
9/6/2012	10:53:18 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:53:18 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:53:19 AM	Tube furnace set to 50
9/6/2012	10:53:20 AM	Helium valve closed
9/6/2012	10:53:20 AM	BCl3 valve closed
9/6/2012	10:53:20 AM	PH3 valve closed
9/6/2012	10:53:20 AM	SiCl4 pre valve closed
9/6/2012	10:53:20 AM	SiCl4 post valve closed
9/6/2012	10:53:20 AM	Main Vac valve closed
9/6/2012	10:53:20 AM	Bypass valve closed
9/6/2012	10:53:20 AM	H2 valve opened
9/6/2012	10:53:20 AM	Bubbler valve opened
9/6/2012	10:53:20 AM	Helium MFC set to  0.000000
9/6/2012	10:53:20 AM	H2 MFC set to  500.000000
9/6/2012	10:53:20 AM	BCl3 MFC set to  0.000000
9/6/2012	10:53:20 AM	PH3 MFC set to  0.000000
9/6/2012	10:53:20 AM	SiCl4 MFC set to  0.000000
9/6/2012	10:53:20 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	10:53:20 AM	Tube furnace set to 1000
9/6/2012	11:13:20 AM	Helium valve closed
9/6/2012	11:13:20 AM	BCl3 valve closed
9/6/2012	11:13:20 AM	PH3 valve closed
9/6/2012	11:13:20 AM	Main Vac valve closed
9/6/2012	11:13:20 AM	Bypass valve closed
9/6/2012	11:13:20 AM	H2 valve opened
9/6/2012	11:13:20 AM	SiCl4 pre valve opened
9/6/2012	11:13:20 AM	SiCl4 post valve opened
9/6/2012	11:13:20 AM	Bubbler valve opened
9/6/2012	11:13:20 AM	Helium MFC set to  0.000000
9/6/2012	11:13:20 AM	H2 MFC set to  500.000000
9/6/2012	11:13:20 AM	BCl3 MFC set to  0.000000
9/6/2012	11:13:20 AM	PH3 MFC set to  0.000000
9/6/2012	11:13:20 AM	SiCl4 MFC set to  50.000000
9/6/2012	11:13:20 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	11:13:20 AM	Tube furnace set to 1000
9/6/2012	11:33:20 AM	Helium valve closed
9/6/2012	11:33:20 AM	BCl3 valve closed
9/6/2012	11:33:20 AM	PH3 valve closed
9/6/2012	11:33:20 AM	SiCl4 pre valve closed
9/6/2012	11:33:20 AM	SiCl4 post valve closed
9/6/2012	11:33:20 AM	Main Vac valve closed
9/6/2012	11:33:20 AM	Bypass valve closed
9/6/2012	11:33:20 AM	H2 valve opened
9/6/2012	11:33:20 AM	Bubbler valve opened
9/6/2012	11:33:20 AM	Helium MFC set to  0.000000
9/6/2012	11:33:20 AM	H2 MFC set to  500.000000
9/6/2012	11:33:20 AM	BCl3 MFC set to  0.000000
9/6/2012	11:33:20 AM	PH3 MFC set to  0.000000
9/6/2012	11:33:20 AM	SiCl4 MFC set to  0.000000
9/6/2012	11:33:20 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	11:33:20 AM	Tube furnace set to 950
9/6/2012	11:36:20 AM	Helium valve closed
9/6/2012	11:36:20 AM	BCl3 valve closed
9/6/2012	11:36:20 AM	PH3 valve closed
9/6/2012	11:36:20 AM	SiCl4 pre valve closed
9/6/2012	11:36:20 AM	SiCl4 post valve closed
9/6/2012	11:36:20 AM	Main Vac valve closed
9/6/2012	11:36:20 AM	Bypass valve closed
9/6/2012	11:36:20 AM	H2 valve opened
9/6/2012	11:36:20 AM	Bubbler valve opened
9/6/2012	11:36:20 AM	Helium MFC set to  0.000000
9/6/2012	11:36:20 AM	H2 MFC set to  500.000000
9/6/2012	11:36:20 AM	BCl3 MFC set to  0.000000
9/6/2012	11:36:20 AM	PH3 MFC set to  0.000000
9/6/2012	11:36:20 AM	SiCl4 MFC set to  0.000000
9/6/2012	11:36:20 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	11:36:21 AM	Tube furnace set to 900
9/6/2012	11:39:21 AM	Helium valve closed
9/6/2012	11:39:21 AM	BCl3 valve closed
9/6/2012	11:39:21 AM	PH3 valve closed
9/6/2012	11:39:21 AM	SiCl4 pre valve closed
9/6/2012	11:39:21 AM	SiCl4 post valve closed
9/6/2012	11:39:21 AM	Main Vac valve closed
9/6/2012	11:39:21 AM	Bypass valve closed
9/6/2012	11:39:21 AM	H2 valve opened
9/6/2012	11:39:21 AM	Bubbler valve opened
9/6/2012	11:39:21 AM	Helium MFC set to  0.000000
9/6/2012	11:39:21 AM	H2 MFC set to  500.000000
9/6/2012	11:39:21 AM	BCl3 MFC set to  0.000000
9/6/2012	11:39:21 AM	PH3 MFC set to  0.000000
9/6/2012	11:39:21 AM	SiCl4 MFC set to  0.000000
9/6/2012	11:39:21 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	11:39:21 AM	Tube furnace set to 850
9/6/2012	11:42:21 AM	Helium valve closed
9/6/2012	11:42:21 AM	BCl3 valve closed
9/6/2012	11:42:21 AM	PH3 valve closed
9/6/2012	11:42:21 AM	SiCl4 pre valve closed
9/6/2012	11:42:21 AM	SiCl4 post valve closed
9/6/2012	11:42:21 AM	Main Vac valve closed
9/6/2012	11:42:21 AM	Bypass valve closed
9/6/2012	11:42:21 AM	H2 valve opened
9/6/2012	11:42:21 AM	Bubbler valve opened
9/6/2012	11:42:21 AM	Helium MFC set to  0.000000
9/6/2012	11:42:21 AM	H2 MFC set to  500.000000
9/6/2012	11:42:21 AM	BCl3 MFC set to  0.000000
9/6/2012	11:42:21 AM	PH3 MFC set to  0.000000
9/6/2012	11:42:21 AM	SiCl4 MFC set to  0.000000
9/6/2012	11:42:21 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	11:42:21 AM	Tube furnace set to 800
9/6/2012	11:45:21 AM	Helium valve closed
9/6/2012	11:45:21 AM	BCl3 valve closed
9/6/2012	11:45:21 AM	PH3 valve closed
9/6/2012	11:45:21 AM	SiCl4 pre valve closed
9/6/2012	11:45:21 AM	SiCl4 post valve closed
9/6/2012	11:45:21 AM	Main Vac valve closed
9/6/2012	11:45:21 AM	Bypass valve closed
9/6/2012	11:45:21 AM	H2 valve opened
9/6/2012	11:45:21 AM	Bubbler valve opened
9/6/2012	11:45:21 AM	Helium MFC set to  0.000000
9/6/2012	11:45:21 AM	H2 MFC set to  500.000000
9/6/2012	11:45:21 AM	BCl3 MFC set to  0.000000
9/6/2012	11:45:21 AM	PH3 MFC set to  0.000000
9/6/2012	11:45:21 AM	SiCl4 MFC set to  0.000000
9/6/2012	11:45:21 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	11:45:21 AM	Tube furnace set to 750
9/6/2012	11:48:21 AM	H2 valve closed
9/6/2012	11:48:21 AM	BCl3 valve closed
9/6/2012	11:48:21 AM	PH3 valve closed
9/6/2012	11:48:21 AM	SiCl4 pre valve closed
9/6/2012	11:48:21 AM	SiCl4 post valve closed
9/6/2012	11:48:21 AM	Main Vac valve closed
9/6/2012	11:48:21 AM	Bypass valve closed
9/6/2012	11:48:21 AM	Helium valve opened
9/6/2012	11:48:21 AM	Bubbler valve opened
9/6/2012	11:48:21 AM	Helium MFC set to  400.000000
9/6/2012	11:48:21 AM	H2 MFC set to  0.000000
9/6/2012	11:48:21 AM	BCl3 MFC set to  0.000000
9/6/2012	11:48:21 AM	PH3 MFC set to  0.000000
9/6/2012	11:48:21 AM	SiCl4 MFC set to  0.000000
9/6/2012	11:48:21 AM	Bypass solenoid MFC set to  0.000000
9/6/2012	11:48:21 AM	Tube furnace set to 0
9/6/2012	12:13:21 PM	Helium valve closed
9/6/2012	12:13:21 PM	H2 valve closed
9/6/2012	12:13:21 PM	BCl3 valve closed
9/6/2012	12:13:21 PM	PH3 valve closed
9/6/2012	12:13:21 PM	SiCl4 pre valve closed
9/6/2012	12:13:21 PM	SiCl4 post valve closed
9/6/2012	12:13:21 PM	Main Vac valve closed
9/6/2012	12:13:21 PM	Bypass valve closed
9/6/2012	12:13:21 PM	Bubbler valve closed
9/6/2012	12:13:21 PM	Helium MFC set to  0.000000
9/6/2012	12:13:21 PM	H2 MFC set to  0.000000
9/6/2012	12:13:21 PM	BCl3 MFC set to  0.000000
9/6/2012	12:13:21 PM	PH3 MFC set to  0.000000
9/6/2012	12:13:21 PM	SiCl4 MFC set to  0.000000
9/6/2012	12:13:21 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	12:13:22 PM	Tube furnace set to 50
9/6/2012	12:18:22 PM	Helium valve closed
9/6/2012	12:18:22 PM	H2 valve closed
9/6/2012	12:18:22 PM	BCl3 valve closed
9/6/2012	12:18:22 PM	PH3 valve closed
9/6/2012	12:18:22 PM	SiCl4 pre valve closed
9/6/2012	12:18:22 PM	SiCl4 post valve closed
9/6/2012	12:18:22 PM	Main Vac valve closed
9/6/2012	12:18:22 PM	Bubbler valve closed
9/6/2012	12:18:22 PM	Bypass valve opened
9/6/2012	12:18:22 PM	Helium MFC set to  0.000000
9/6/2012	12:18:22 PM	H2 MFC set to  0.000000
9/6/2012	12:18:22 PM	BCl3 MFC set to  0.000000
9/6/2012	12:18:22 PM	PH3 MFC set to  0.000000
9/6/2012	12:18:22 PM	SiCl4 MFC set to  0.000000
9/6/2012	12:18:22 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	12:18:22 PM	Tube furnace set to 0
9/6/2012	12:19:19 PM	Helium valve closed
9/6/2012	12:19:19 PM	H2 valve closed
9/6/2012	12:19:19 PM	BCl3 valve closed
9/6/2012	12:19:19 PM	PH3 valve closed
9/6/2012	12:19:19 PM	SiCl4 pre valve closed
9/6/2012	12:19:19 PM	SiCl4 post valve closed
9/6/2012	12:19:19 PM	Bypass valve closed
9/6/2012	12:19:19 PM	Bubbler valve closed
9/6/2012	12:19:19 PM	Main Vac valve opened
9/6/2012	12:19:19 PM	Helium MFC set to  0.000000
9/6/2012	12:19:19 PM	H2 MFC set to  0.000000
9/6/2012	12:19:19 PM	BCl3 MFC set to  0.000000
9/6/2012	12:19:19 PM	PH3 MFC set to  0.000000
9/6/2012	12:19:19 PM	SiCl4 MFC set to  0.000000
9/6/2012	12:19:19 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	12:19:19 PM	Tube furnace set to 0
9/6/2012	12:19:20 PM	Run finished at 12:19 PM
9/6/2012	12:54:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/6/2012	12:54:03 PM	Recipe started at 12:54 PM
9/6/2012	12:54:03 PM	Helium valve closed
9/6/2012	12:54:03 PM	H2 valve closed
9/6/2012	12:54:03 PM	BCl3 valve closed
9/6/2012	12:54:03 PM	PH3 valve closed
9/6/2012	12:54:03 PM	SiCl4 pre valve closed
9/6/2012	12:54:03 PM	SiCl4 post valve closed
9/6/2012	12:54:03 PM	Main Vac valve closed
9/6/2012	12:54:03 PM	Bypass valve closed
9/6/2012	12:54:03 PM	Bubbler valve closed
9/6/2012	12:54:03 PM	Helium MFC set to  0.000000
9/6/2012	12:54:03 PM	H2 MFC set to  0.000000
9/6/2012	12:54:03 PM	BCl3 MFC set to  0.000000
9/6/2012	12:54:03 PM	PH3 MFC set to  0.000000
9/6/2012	12:54:03 PM	SiCl4 MFC set to  0.000000
9/6/2012	12:54:03 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	12:54:03 PM	Tube furnace set to 0
9/6/2012	12:54:06 PM	H2 valve closed
9/6/2012	12:54:06 PM	BCl3 valve closed
9/6/2012	12:54:06 PM	PH3 valve closed
9/6/2012	12:54:06 PM	SiCl4 pre valve closed
9/6/2012	12:54:06 PM	SiCl4 post valve closed
9/6/2012	12:54:06 PM	Main Vac valve closed
9/6/2012	12:54:06 PM	Bypass valve closed
9/6/2012	12:54:06 PM	Bubbler valve closed
9/6/2012	12:54:06 PM	Helium valve opened
9/6/2012	12:54:06 PM	Helium MFC set to  500.000000
9/6/2012	12:54:06 PM	H2 MFC set to  0.000000
9/6/2012	12:54:06 PM	BCl3 MFC set to  0.000000
9/6/2012	12:54:06 PM	PH3 MFC set to  0.000000
9/6/2012	12:54:06 PM	SiCl4 MFC set to  0.000000
9/6/2012	12:54:06 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	12:54:06 PM	Tube furnace set to 0
9/6/2012	12:55:12 PM	Helium valve closed
9/6/2012	12:55:12 PM	H2 valve closed
9/6/2012	12:55:12 PM	BCl3 valve closed
9/6/2012	12:55:12 PM	PH3 valve closed
9/6/2012	12:55:12 PM	SiCl4 pre valve closed
9/6/2012	12:55:12 PM	SiCl4 post valve closed
9/6/2012	12:55:12 PM	Main Vac valve closed
9/6/2012	12:55:12 PM	Bypass valve closed
9/6/2012	12:55:12 PM	Bubbler valve closed
9/6/2012	12:55:12 PM	Helium MFC set to  0.000000
9/6/2012	12:55:12 PM	H2 MFC set to  0.000000
9/6/2012	12:55:12 PM	BCl3 MFC set to  0.000000
9/6/2012	12:55:12 PM	PH3 MFC set to  0.000000
9/6/2012	12:55:12 PM	SiCl4 MFC set to  0.000000
9/6/2012	12:55:12 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	12:55:12 PM	Tube furnace set to 0
9/6/2012	12:55:13 PM	Run finished at 12:55 PM
9/6/2012	12:55:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/6/2012	1:00:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/6/2012	1:00:23 PM	Recipe started at 1:00 PM
9/6/2012	1:00:23 PM	Helium valve closed
9/6/2012	1:00:23 PM	H2 valve closed
9/6/2012	1:00:23 PM	BCl3 valve closed
9/6/2012	1:00:23 PM	PH3 valve closed
9/6/2012	1:00:23 PM	SiCl4 pre valve closed
9/6/2012	1:00:23 PM	SiCl4 post valve closed
9/6/2012	1:00:23 PM	Main Vac valve closed
9/6/2012	1:00:23 PM	Bubbler valve closed
9/6/2012	1:00:23 PM	Bypass valve opened
9/6/2012	1:00:23 PM	Helium MFC set to  0.000000
9/6/2012	1:00:23 PM	H2 MFC set to  0.000000
9/6/2012	1:00:23 PM	BCl3 MFC set to  0.000000
9/6/2012	1:00:23 PM	PH3 MFC set to  0.000000
9/6/2012	1:00:23 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:00:23 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:00:23 PM	Tube furnace set to 0
9/6/2012	1:01:30 PM	Helium valve closed
9/6/2012	1:01:30 PM	H2 valve closed
9/6/2012	1:01:30 PM	BCl3 valve closed
9/6/2012	1:01:30 PM	PH3 valve closed
9/6/2012	1:01:30 PM	SiCl4 pre valve closed
9/6/2012	1:01:30 PM	SiCl4 post valve closed
9/6/2012	1:01:30 PM	Main Vac valve closed
9/6/2012	1:01:30 PM	Bubbler valve closed
9/6/2012	1:01:30 PM	Bypass valve opened
9/6/2012	1:01:30 PM	Helium MFC set to  0.000000
9/6/2012	1:01:30 PM	H2 MFC set to  0.000000
9/6/2012	1:01:30 PM	BCl3 MFC set to  0.000000
9/6/2012	1:01:30 PM	PH3 MFC set to  0.000000
9/6/2012	1:01:30 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:01:30 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:01:30 PM	Tube furnace set to 0
9/6/2012	1:02:24 PM	Helium valve closed
9/6/2012	1:02:24 PM	H2 valve closed
9/6/2012	1:02:24 PM	BCl3 valve closed
9/6/2012	1:02:24 PM	PH3 valve closed
9/6/2012	1:02:24 PM	SiCl4 pre valve closed
9/6/2012	1:02:24 PM	SiCl4 post valve closed
9/6/2012	1:02:24 PM	Bypass valve closed
9/6/2012	1:02:24 PM	Bubbler valve closed
9/6/2012	1:02:24 PM	Main Vac valve opened
9/6/2012	1:02:24 PM	Helium MFC set to  0.000000
9/6/2012	1:02:24 PM	H2 MFC set to  0.000000
9/6/2012	1:02:24 PM	BCl3 MFC set to  0.000000
9/6/2012	1:02:24 PM	PH3 MFC set to  0.000000
9/6/2012	1:02:24 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:02:24 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:02:24 PM	Tube furnace set to 0
9/6/2012	1:02:25 PM	Run finished at 1:02 PM
9/6/2012	1:02:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/6/2012	1:03:20 PM	Recipe started at 1:03 PM
9/6/2012	1:03:20 PM	Helium valve closed
9/6/2012	1:03:20 PM	H2 valve closed
9/6/2012	1:03:20 PM	BCl3 valve closed
9/6/2012	1:03:20 PM	PH3 valve closed
9/6/2012	1:03:20 PM	SiCl4 pre valve closed
9/6/2012	1:03:20 PM	SiCl4 post valve closed
9/6/2012	1:03:20 PM	Bypass valve closed
9/6/2012	1:03:20 PM	Bubbler valve closed
9/6/2012	1:03:20 PM	Main Vac valve opened
9/6/2012	1:03:20 PM	Helium MFC set to  0.000000
9/6/2012	1:03:20 PM	H2 MFC set to  0.000000
9/6/2012	1:03:20 PM	BCl3 MFC set to  0.000000
9/6/2012	1:03:20 PM	PH3 MFC set to  0.000000
9/6/2012	1:03:20 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:03:20 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:03:21 PM	Tube furnace set to 150
9/6/2012	1:03:51 PM	H2 valve closed
9/6/2012	1:03:51 PM	BCl3 valve closed
9/6/2012	1:03:51 PM	PH3 valve closed
9/6/2012	1:03:51 PM	SiCl4 pre valve closed
9/6/2012	1:03:51 PM	SiCl4 post valve closed
9/6/2012	1:03:51 PM	Bypass valve closed
9/6/2012	1:03:51 PM	Bubbler valve closed
9/6/2012	1:03:51 PM	Helium valve opened
9/6/2012	1:03:51 PM	Main Vac valve opened
9/6/2012	1:03:51 PM	Helium MFC set to  20.000000
9/6/2012	1:03:51 PM	H2 MFC set to  0.000000
9/6/2012	1:03:51 PM	BCl3 MFC set to  0.000000
9/6/2012	1:03:51 PM	PH3 MFC set to  0.000000
9/6/2012	1:03:51 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:03:51 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:03:51 PM	Tube furnace set to 150
9/6/2012	1:04:21 PM	Helium valve closed
9/6/2012	1:04:21 PM	H2 valve closed
9/6/2012	1:04:21 PM	BCl3 valve closed
9/6/2012	1:04:21 PM	PH3 valve closed
9/6/2012	1:04:21 PM	SiCl4 pre valve closed
9/6/2012	1:04:21 PM	SiCl4 post valve closed
9/6/2012	1:04:21 PM	Bypass valve closed
9/6/2012	1:04:21 PM	Bubbler valve closed
9/6/2012	1:04:21 PM	Main Vac valve opened
9/6/2012	1:04:21 PM	Helium MFC set to  0.000000
9/6/2012	1:04:21 PM	H2 MFC set to  0.000000
9/6/2012	1:04:21 PM	BCl3 MFC set to  0.000000
9/6/2012	1:04:21 PM	PH3 MFC set to  0.000000
9/6/2012	1:04:21 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:04:21 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:04:21 PM	Tube furnace set to 150
9/6/2012	1:04:51 PM	H2 valve closed
9/6/2012	1:04:51 PM	BCl3 valve closed
9/6/2012	1:04:51 PM	PH3 valve closed
9/6/2012	1:04:51 PM	SiCl4 pre valve closed
9/6/2012	1:04:51 PM	SiCl4 post valve closed
9/6/2012	1:04:51 PM	Bypass valve closed
9/6/2012	1:04:51 PM	Bubbler valve closed
9/6/2012	1:04:51 PM	Helium valve opened
9/6/2012	1:04:51 PM	Main Vac valve opened
9/6/2012	1:04:51 PM	Helium MFC set to  20.000000
9/6/2012	1:04:51 PM	H2 MFC set to  0.000000
9/6/2012	1:04:51 PM	BCl3 MFC set to  0.000000
9/6/2012	1:04:51 PM	PH3 MFC set to  0.000000
9/6/2012	1:04:51 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:04:51 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:04:51 PM	Tube furnace set to 150
9/6/2012	1:05:21 PM	Helium valve closed
9/6/2012	1:05:21 PM	H2 valve closed
9/6/2012	1:05:21 PM	BCl3 valve closed
9/6/2012	1:05:21 PM	PH3 valve closed
9/6/2012	1:05:21 PM	SiCl4 pre valve closed
9/6/2012	1:05:21 PM	SiCl4 post valve closed
9/6/2012	1:05:21 PM	Bypass valve closed
9/6/2012	1:05:21 PM	Bubbler valve closed
9/6/2012	1:05:21 PM	Main Vac valve opened
9/6/2012	1:05:21 PM	Helium MFC set to  0.000000
9/6/2012	1:05:21 PM	H2 MFC set to  0.000000
9/6/2012	1:05:21 PM	BCl3 MFC set to  0.000000
9/6/2012	1:05:21 PM	PH3 MFC set to  0.000000
9/6/2012	1:05:21 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:05:21 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:05:22 PM	Tube furnace set to 150
9/6/2012	1:05:52 PM	H2 valve closed
9/6/2012	1:05:52 PM	BCl3 valve closed
9/6/2012	1:05:52 PM	PH3 valve closed
9/6/2012	1:05:52 PM	SiCl4 pre valve closed
9/6/2012	1:05:52 PM	SiCl4 post valve closed
9/6/2012	1:05:52 PM	Bypass valve closed
9/6/2012	1:05:52 PM	Bubbler valve closed
9/6/2012	1:05:52 PM	Helium valve opened
9/6/2012	1:05:52 PM	Main Vac valve opened
9/6/2012	1:05:52 PM	Helium MFC set to  20.000000
9/6/2012	1:05:52 PM	H2 MFC set to  0.000000
9/6/2012	1:05:52 PM	BCl3 MFC set to  0.000000
9/6/2012	1:05:52 PM	PH3 MFC set to  0.000000
9/6/2012	1:05:52 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:05:52 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:05:52 PM	Tube furnace set to 150
9/6/2012	1:06:22 PM	Helium valve closed
9/6/2012	1:06:22 PM	H2 valve closed
9/6/2012	1:06:22 PM	BCl3 valve closed
9/6/2012	1:06:22 PM	PH3 valve closed
9/6/2012	1:06:22 PM	SiCl4 pre valve closed
9/6/2012	1:06:22 PM	SiCl4 post valve closed
9/6/2012	1:06:22 PM	Bypass valve closed
9/6/2012	1:06:22 PM	Bubbler valve closed
9/6/2012	1:06:22 PM	Main Vac valve opened
9/6/2012	1:06:22 PM	Helium MFC set to  0.000000
9/6/2012	1:06:22 PM	H2 MFC set to  0.000000
9/6/2012	1:06:22 PM	BCl3 MFC set to  0.000000
9/6/2012	1:06:22 PM	PH3 MFC set to  0.000000
9/6/2012	1:06:22 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:06:22 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:06:22 PM	Tube furnace set to 150
9/6/2012	1:06:52 PM	H2 valve closed
9/6/2012	1:06:52 PM	BCl3 valve closed
9/6/2012	1:06:52 PM	PH3 valve closed
9/6/2012	1:06:52 PM	SiCl4 pre valve closed
9/6/2012	1:06:52 PM	SiCl4 post valve closed
9/6/2012	1:06:52 PM	Bypass valve closed
9/6/2012	1:06:52 PM	Bubbler valve closed
9/6/2012	1:06:52 PM	Helium valve opened
9/6/2012	1:06:52 PM	Main Vac valve opened
9/6/2012	1:06:52 PM	Helium MFC set to  20.000000
9/6/2012	1:06:52 PM	H2 MFC set to  0.000000
9/6/2012	1:06:52 PM	BCl3 MFC set to  0.000000
9/6/2012	1:06:52 PM	PH3 MFC set to  0.000000
9/6/2012	1:06:52 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:06:52 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:06:52 PM	Tube furnace set to 150
9/6/2012	1:07:22 PM	Helium valve closed
9/6/2012	1:07:22 PM	H2 valve closed
9/6/2012	1:07:22 PM	BCl3 valve closed
9/6/2012	1:07:22 PM	PH3 valve closed
9/6/2012	1:07:22 PM	SiCl4 pre valve closed
9/6/2012	1:07:22 PM	SiCl4 post valve closed
9/6/2012	1:07:22 PM	Bypass valve closed
9/6/2012	1:07:22 PM	Bubbler valve closed
9/6/2012	1:07:22 PM	Main Vac valve opened
9/6/2012	1:07:22 PM	Helium MFC set to  0.000000
9/6/2012	1:07:22 PM	H2 MFC set to  0.000000
9/6/2012	1:07:22 PM	BCl3 MFC set to  0.000000
9/6/2012	1:07:22 PM	PH3 MFC set to  0.000000
9/6/2012	1:07:22 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:07:22 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:07:23 PM	Tube furnace set to 150
9/6/2012	1:07:53 PM	H2 valve closed
9/6/2012	1:07:53 PM	BCl3 valve closed
9/6/2012	1:07:53 PM	PH3 valve closed
9/6/2012	1:07:53 PM	SiCl4 pre valve closed
9/6/2012	1:07:53 PM	SiCl4 post valve closed
9/6/2012	1:07:53 PM	Bypass valve closed
9/6/2012	1:07:53 PM	Bubbler valve closed
9/6/2012	1:07:53 PM	Helium valve opened
9/6/2012	1:07:53 PM	Main Vac valve opened
9/6/2012	1:07:53 PM	Helium MFC set to  20.000000
9/6/2012	1:07:53 PM	H2 MFC set to  0.000000
9/6/2012	1:07:53 PM	BCl3 MFC set to  0.000000
9/6/2012	1:07:53 PM	PH3 MFC set to  0.000000
9/6/2012	1:07:53 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:07:53 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:07:53 PM	Tube furnace set to 150
9/6/2012	1:08:23 PM	Helium valve closed
9/6/2012	1:08:23 PM	H2 valve closed
9/6/2012	1:08:23 PM	BCl3 valve closed
9/6/2012	1:08:23 PM	PH3 valve closed
9/6/2012	1:08:23 PM	SiCl4 pre valve closed
9/6/2012	1:08:23 PM	SiCl4 post valve closed
9/6/2012	1:08:23 PM	Bypass valve closed
9/6/2012	1:08:23 PM	Bubbler valve closed
9/6/2012	1:08:23 PM	Main Vac valve opened
9/6/2012	1:08:23 PM	Helium MFC set to  0.000000
9/6/2012	1:08:23 PM	H2 MFC set to  0.000000
9/6/2012	1:08:23 PM	BCl3 MFC set to  0.000000
9/6/2012	1:08:23 PM	PH3 MFC set to  0.000000
9/6/2012	1:08:23 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:08:23 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:08:23 PM	Tube furnace set to 150
9/6/2012	1:08:53 PM	H2 valve closed
9/6/2012	1:08:53 PM	BCl3 valve closed
9/6/2012	1:08:53 PM	PH3 valve closed
9/6/2012	1:08:53 PM	SiCl4 pre valve closed
9/6/2012	1:08:53 PM	SiCl4 post valve closed
9/6/2012	1:08:53 PM	Bypass valve closed
9/6/2012	1:08:53 PM	Bubbler valve closed
9/6/2012	1:08:53 PM	Helium valve opened
9/6/2012	1:08:53 PM	Main Vac valve opened
9/6/2012	1:08:53 PM	Helium MFC set to  20.000000
9/6/2012	1:08:53 PM	H2 MFC set to  0.000000
9/6/2012	1:08:53 PM	BCl3 MFC set to  0.000000
9/6/2012	1:08:53 PM	PH3 MFC set to  0.000000
9/6/2012	1:08:53 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:08:53 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:08:53 PM	Tube furnace set to 150
9/6/2012	1:09:23 PM	Helium valve closed
9/6/2012	1:09:23 PM	H2 valve closed
9/6/2012	1:09:23 PM	BCl3 valve closed
9/6/2012	1:09:23 PM	PH3 valve closed
9/6/2012	1:09:23 PM	SiCl4 pre valve closed
9/6/2012	1:09:23 PM	SiCl4 post valve closed
9/6/2012	1:09:23 PM	Bypass valve closed
9/6/2012	1:09:23 PM	Bubbler valve closed
9/6/2012	1:09:23 PM	Main Vac valve opened
9/6/2012	1:09:23 PM	Helium MFC set to  0.000000
9/6/2012	1:09:23 PM	H2 MFC set to  0.000000
9/6/2012	1:09:23 PM	BCl3 MFC set to  0.000000
9/6/2012	1:09:23 PM	PH3 MFC set to  0.000000
9/6/2012	1:09:23 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:09:23 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:09:23 PM	Tube furnace set to 150
9/6/2012	1:09:53 PM	H2 valve closed
9/6/2012	1:09:53 PM	BCl3 valve closed
9/6/2012	1:09:53 PM	PH3 valve closed
9/6/2012	1:09:54 PM	SiCl4 pre valve closed
9/6/2012	1:09:54 PM	SiCl4 post valve closed
9/6/2012	1:09:54 PM	Bypass valve closed
9/6/2012	1:09:54 PM	Bubbler valve closed
9/6/2012	1:09:54 PM	Helium valve opened
9/6/2012	1:09:54 PM	Main Vac valve opened
9/6/2012	1:09:54 PM	Helium MFC set to  20.000000
9/6/2012	1:09:54 PM	H2 MFC set to  0.000000
9/6/2012	1:09:54 PM	BCl3 MFC set to  0.000000
9/6/2012	1:09:54 PM	PH3 MFC set to  0.000000
9/6/2012	1:09:54 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:09:54 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:09:54 PM	Tube furnace set to 150
9/6/2012	1:10:24 PM	Helium valve closed
9/6/2012	1:10:24 PM	H2 valve closed
9/6/2012	1:10:24 PM	BCl3 valve closed
9/6/2012	1:10:24 PM	PH3 valve closed
9/6/2012	1:10:24 PM	SiCl4 pre valve closed
9/6/2012	1:10:24 PM	SiCl4 post valve closed
9/6/2012	1:10:24 PM	Bypass valve closed
9/6/2012	1:10:24 PM	Bubbler valve closed
9/6/2012	1:10:24 PM	Main Vac valve opened
9/6/2012	1:10:24 PM	Helium MFC set to  0.000000
9/6/2012	1:10:24 PM	H2 MFC set to  0.000000
9/6/2012	1:10:24 PM	BCl3 MFC set to  0.000000
9/6/2012	1:10:24 PM	PH3 MFC set to  0.000000
9/6/2012	1:10:24 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:10:24 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:10:24 PM	Tube furnace set to 150
9/6/2012	1:10:54 PM	H2 valve closed
9/6/2012	1:10:54 PM	BCl3 valve closed
9/6/2012	1:10:54 PM	PH3 valve closed
9/6/2012	1:10:54 PM	SiCl4 pre valve closed
9/6/2012	1:10:54 PM	SiCl4 post valve closed
9/6/2012	1:10:54 PM	Bypass valve closed
9/6/2012	1:10:54 PM	Bubbler valve closed
9/6/2012	1:10:54 PM	Helium valve opened
9/6/2012	1:10:54 PM	Main Vac valve opened
9/6/2012	1:10:54 PM	Helium MFC set to  20.000000
9/6/2012	1:10:54 PM	H2 MFC set to  0.000000
9/6/2012	1:10:54 PM	BCl3 MFC set to  0.000000
9/6/2012	1:10:54 PM	PH3 MFC set to  0.000000
9/6/2012	1:10:54 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:10:54 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:10:54 PM	Tube furnace set to 150
9/6/2012	1:11:24 PM	Helium valve closed
9/6/2012	1:11:24 PM	H2 valve closed
9/6/2012	1:11:24 PM	BCl3 valve closed
9/6/2012	1:11:24 PM	PH3 valve closed
9/6/2012	1:11:24 PM	SiCl4 pre valve closed
9/6/2012	1:11:24 PM	SiCl4 post valve closed
9/6/2012	1:11:24 PM	Bypass valve closed
9/6/2012	1:11:24 PM	Bubbler valve closed
9/6/2012	1:11:24 PM	Main Vac valve opened
9/6/2012	1:11:24 PM	Helium MFC set to  0.000000
9/6/2012	1:11:24 PM	H2 MFC set to  0.000000
9/6/2012	1:11:24 PM	BCl3 MFC set to  0.000000
9/6/2012	1:11:24 PM	PH3 MFC set to  0.000000
9/6/2012	1:11:24 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:11:24 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:11:24 PM	Tube furnace set to 150
9/6/2012	1:11:54 PM	H2 valve closed
9/6/2012	1:11:54 PM	BCl3 valve closed
9/6/2012	1:11:54 PM	PH3 valve closed
9/6/2012	1:11:54 PM	SiCl4 pre valve closed
9/6/2012	1:11:54 PM	SiCl4 post valve closed
9/6/2012	1:11:54 PM	Bypass valve closed
9/6/2012	1:11:54 PM	Bubbler valve closed
9/6/2012	1:11:54 PM	Helium valve opened
9/6/2012	1:11:54 PM	Main Vac valve opened
9/6/2012	1:11:54 PM	Helium MFC set to  20.000000
9/6/2012	1:11:54 PM	H2 MFC set to  0.000000
9/6/2012	1:11:54 PM	BCl3 MFC set to  0.000000
9/6/2012	1:11:54 PM	PH3 MFC set to  0.000000
9/6/2012	1:11:54 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:11:54 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:11:55 PM	Tube furnace set to 150
9/6/2012	1:12:25 PM	Helium valve closed
9/6/2012	1:12:25 PM	H2 valve closed
9/6/2012	1:12:25 PM	BCl3 valve closed
9/6/2012	1:12:25 PM	PH3 valve closed
9/6/2012	1:12:25 PM	SiCl4 pre valve closed
9/6/2012	1:12:25 PM	SiCl4 post valve closed
9/6/2012	1:12:25 PM	Bypass valve closed
9/6/2012	1:12:25 PM	Bubbler valve closed
9/6/2012	1:12:25 PM	Main Vac valve opened
9/6/2012	1:12:25 PM	Helium MFC set to  0.000000
9/6/2012	1:12:25 PM	H2 MFC set to  0.000000
9/6/2012	1:12:25 PM	BCl3 MFC set to  0.000000
9/6/2012	1:12:25 PM	PH3 MFC set to  0.000000
9/6/2012	1:12:25 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:12:25 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:12:25 PM	Tube furnace set to 150
9/6/2012	1:12:55 PM	H2 valve closed
9/6/2012	1:12:55 PM	BCl3 valve closed
9/6/2012	1:12:55 PM	PH3 valve closed
9/6/2012	1:12:55 PM	SiCl4 pre valve closed
9/6/2012	1:12:55 PM	SiCl4 post valve closed
9/6/2012	1:12:55 PM	Bypass valve closed
9/6/2012	1:12:55 PM	Bubbler valve closed
9/6/2012	1:12:55 PM	Helium valve opened
9/6/2012	1:12:55 PM	Main Vac valve opened
9/6/2012	1:12:55 PM	Helium MFC set to  20.000000
9/6/2012	1:12:55 PM	H2 MFC set to  0.000000
9/6/2012	1:12:55 PM	BCl3 MFC set to  0.000000
9/6/2012	1:12:55 PM	PH3 MFC set to  0.000000
9/6/2012	1:12:55 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:12:55 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:12:55 PM	Tube furnace set to 150
9/6/2012	1:13:25 PM	Helium valve closed
9/6/2012	1:13:25 PM	H2 valve closed
9/6/2012	1:13:25 PM	BCl3 valve closed
9/6/2012	1:13:25 PM	PH3 valve closed
9/6/2012	1:13:25 PM	SiCl4 pre valve closed
9/6/2012	1:13:25 PM	SiCl4 post valve closed
9/6/2012	1:13:25 PM	Bypass valve closed
9/6/2012	1:13:25 PM	Bubbler valve closed
9/6/2012	1:13:25 PM	Main Vac valve opened
9/6/2012	1:13:25 PM	Helium MFC set to  0.000000
9/6/2012	1:13:25 PM	H2 MFC set to  0.000000
9/6/2012	1:13:25 PM	BCl3 MFC set to  0.000000
9/6/2012	1:13:25 PM	PH3 MFC set to  0.000000
9/6/2012	1:13:25 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:13:25 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:13:25 PM	Tube furnace set to 150
9/6/2012	1:13:26 PM	Run finished at 1:13 PM
9/6/2012	1:21:32 PM	Main Vac valve closed
9/6/2012	1:21:47 PM	Main Vac valve opened
9/6/2012	1:21:50 PM	Helium MFC set to  20.000000
9/6/2012	1:21:51 PM	Helium valve opened
9/6/2012	1:22:07 PM	Helium valve closed
9/6/2012	1:23:17 PM	Helium valve opened
9/6/2012	1:24:20 PM	Helium valve closed
9/6/2012	1:25:03 PM	Recipe started at 1:24 PM
9/6/2012	1:25:03 PM	Helium valve closed
9/6/2012	1:25:03 PM	H2 valve closed
9/6/2012	1:25:03 PM	BCl3 valve closed
9/6/2012	1:25:03 PM	PH3 valve closed
9/6/2012	1:25:03 PM	SiCl4 pre valve closed
9/6/2012	1:25:03 PM	SiCl4 post valve closed
9/6/2012	1:25:03 PM	Main Vac valve closed
9/6/2012	1:25:03 PM	Bypass valve closed
9/6/2012	1:25:03 PM	Bubbler valve closed
9/6/2012	1:25:03 PM	Helium MFC set to  0.000000
9/6/2012	1:25:03 PM	H2 MFC set to  0.000000
9/6/2012	1:25:03 PM	BCl3 MFC set to  0.000000
9/6/2012	1:25:03 PM	PH3 MFC set to  0.000000
9/6/2012	1:25:03 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:25:03 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:25:03 PM	Tube furnace set to 0
9/6/2012	1:25:06 PM	Helium valve closed
9/6/2012	1:25:06 PM	BCl3 valve closed
9/6/2012	1:25:06 PM	PH3 valve closed
9/6/2012	1:25:06 PM	SiCl4 pre valve closed
9/6/2012	1:25:06 PM	SiCl4 post valve closed
9/6/2012	1:25:06 PM	Main Vac valve closed
9/6/2012	1:25:06 PM	Bypass valve closed
9/6/2012	1:25:06 PM	Bubbler valve closed
9/6/2012	1:25:06 PM	H2 valve opened
9/6/2012	1:25:06 PM	Helium MFC set to  0.000000
9/6/2012	1:25:06 PM	H2 MFC set to  500.000000
9/6/2012	1:25:06 PM	BCl3 MFC set to  0.000000
9/6/2012	1:25:06 PM	PH3 MFC set to  0.000000
9/6/2012	1:25:06 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:25:06 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:25:06 PM	Tube furnace set to 50
9/6/2012	1:26:17 PM	Helium valve closed
9/6/2012	1:26:17 PM	BCl3 valve closed
9/6/2012	1:26:17 PM	PH3 valve closed
9/6/2012	1:26:17 PM	SiCl4 pre valve closed
9/6/2012	1:26:17 PM	SiCl4 post valve closed
9/6/2012	1:26:17 PM	Main Vac valve closed
9/6/2012	1:26:17 PM	Bypass valve closed
9/6/2012	1:26:17 PM	H2 valve opened
9/6/2012	1:26:17 PM	Bubbler valve opened
9/6/2012	1:26:17 PM	Helium MFC set to  0.000000
9/6/2012	1:26:17 PM	H2 MFC set to  500.000000
9/6/2012	1:26:17 PM	BCl3 MFC set to  0.000000
9/6/2012	1:26:17 PM	PH3 MFC set to  0.000000
9/6/2012	1:26:17 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:26:17 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:26:17 PM	Tube furnace set to 50
9/6/2012	1:26:18 PM	Helium valve closed
9/6/2012	1:26:18 PM	BCl3 valve closed
9/6/2012	1:26:18 PM	PH3 valve closed
9/6/2012	1:26:18 PM	SiCl4 pre valve closed
9/6/2012	1:26:18 PM	SiCl4 post valve closed
9/6/2012	1:26:18 PM	Main Vac valve closed
9/6/2012	1:26:18 PM	Bypass valve closed
9/6/2012	1:26:18 PM	H2 valve opened
9/6/2012	1:26:18 PM	Bubbler valve opened
9/6/2012	1:26:18 PM	Helium MFC set to  0.000000
9/6/2012	1:26:18 PM	H2 MFC set to  500.000000
9/6/2012	1:26:18 PM	BCl3 MFC set to  0.000000
9/6/2012	1:26:18 PM	PH3 MFC set to  0.000000
9/6/2012	1:26:18 PM	SiCl4 MFC set to  0.000000
9/6/2012	1:26:18 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:26:18 PM	Tube furnace set to 1000
9/6/2012	1:46:18 PM	Helium valve closed
9/6/2012	1:46:18 PM	BCl3 valve closed
9/6/2012	1:46:18 PM	PH3 valve closed
9/6/2012	1:46:18 PM	Main Vac valve closed
9/6/2012	1:46:18 PM	Bypass valve closed
9/6/2012	1:46:18 PM	H2 valve opened
9/6/2012	1:46:18 PM	SiCl4 pre valve opened
9/6/2012	1:46:18 PM	SiCl4 post valve opened
9/6/2012	1:46:18 PM	Bubbler valve opened
9/6/2012	1:46:18 PM	Helium MFC set to  0.000000
9/6/2012	1:46:18 PM	H2 MFC set to  500.000000
9/6/2012	1:46:18 PM	BCl3 MFC set to  0.000000
9/6/2012	1:46:18 PM	PH3 MFC set to  0.000000
9/6/2012	1:46:18 PM	SiCl4 MFC set to  50.000000
9/6/2012	1:46:18 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	1:46:19 PM	Tube furnace set to 1000
9/6/2012	2:06:19 PM	Helium valve closed
9/6/2012	2:06:19 PM	BCl3 valve closed
9/6/2012	2:06:19 PM	PH3 valve closed
9/6/2012	2:06:19 PM	SiCl4 pre valve closed
9/6/2012	2:06:19 PM	SiCl4 post valve closed
9/6/2012	2:06:19 PM	Main Vac valve closed
9/6/2012	2:06:19 PM	Bypass valve closed
9/6/2012	2:06:19 PM	H2 valve opened
9/6/2012	2:06:19 PM	Bubbler valve opened
9/6/2012	2:06:19 PM	Helium MFC set to  0.000000
9/6/2012	2:06:19 PM	H2 MFC set to  500.000000
9/6/2012	2:06:19 PM	BCl3 MFC set to  0.000000
9/6/2012	2:06:19 PM	PH3 MFC set to  0.000000
9/6/2012	2:06:19 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:06:19 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:06:19 PM	Tube furnace set to 950
9/6/2012	2:09:19 PM	Helium valve closed
9/6/2012	2:09:19 PM	BCl3 valve closed
9/6/2012	2:09:19 PM	PH3 valve closed
9/6/2012	2:09:19 PM	SiCl4 pre valve closed
9/6/2012	2:09:19 PM	SiCl4 post valve closed
9/6/2012	2:09:19 PM	Main Vac valve closed
9/6/2012	2:09:19 PM	Bypass valve closed
9/6/2012	2:09:19 PM	H2 valve opened
9/6/2012	2:09:19 PM	Bubbler valve opened
9/6/2012	2:09:19 PM	Helium MFC set to  0.000000
9/6/2012	2:09:19 PM	H2 MFC set to  500.000000
9/6/2012	2:09:19 PM	BCl3 MFC set to  0.000000
9/6/2012	2:09:19 PM	PH3 MFC set to  0.000000
9/6/2012	2:09:19 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:09:19 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:09:19 PM	Tube furnace set to 900
9/6/2012	2:12:19 PM	Helium valve closed
9/6/2012	2:12:19 PM	BCl3 valve closed
9/6/2012	2:12:19 PM	PH3 valve closed
9/6/2012	2:12:19 PM	SiCl4 pre valve closed
9/6/2012	2:12:19 PM	SiCl4 post valve closed
9/6/2012	2:12:19 PM	Main Vac valve closed
9/6/2012	2:12:19 PM	Bypass valve closed
9/6/2012	2:12:19 PM	H2 valve opened
9/6/2012	2:12:19 PM	Bubbler valve opened
9/6/2012	2:12:19 PM	Helium MFC set to  0.000000
9/6/2012	2:12:19 PM	H2 MFC set to  500.000000
9/6/2012	2:12:19 PM	BCl3 MFC set to  0.000000
9/6/2012	2:12:19 PM	PH3 MFC set to  0.000000
9/6/2012	2:12:19 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:12:19 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:12:19 PM	Tube furnace set to 850
9/6/2012	2:15:19 PM	Helium valve closed
9/6/2012	2:15:19 PM	BCl3 valve closed
9/6/2012	2:15:19 PM	PH3 valve closed
9/6/2012	2:15:19 PM	SiCl4 pre valve closed
9/6/2012	2:15:19 PM	SiCl4 post valve closed
9/6/2012	2:15:19 PM	Main Vac valve closed
9/6/2012	2:15:19 PM	Bypass valve closed
9/6/2012	2:15:19 PM	H2 valve opened
9/6/2012	2:15:19 PM	Bubbler valve opened
9/6/2012	2:15:19 PM	Helium MFC set to  0.000000
9/6/2012	2:15:19 PM	H2 MFC set to  500.000000
9/6/2012	2:15:19 PM	BCl3 MFC set to  0.000000
9/6/2012	2:15:19 PM	PH3 MFC set to  0.000000
9/6/2012	2:15:19 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:15:19 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:15:20 PM	Tube furnace set to 800
9/6/2012	2:18:20 PM	Helium valve closed
9/6/2012	2:18:20 PM	BCl3 valve closed
9/6/2012	2:18:20 PM	PH3 valve closed
9/6/2012	2:18:20 PM	SiCl4 pre valve closed
9/6/2012	2:18:20 PM	SiCl4 post valve closed
9/6/2012	2:18:20 PM	Main Vac valve closed
9/6/2012	2:18:20 PM	Bypass valve closed
9/6/2012	2:18:20 PM	H2 valve opened
9/6/2012	2:18:20 PM	Bubbler valve opened
9/6/2012	2:18:20 PM	Helium MFC set to  0.000000
9/6/2012	2:18:20 PM	H2 MFC set to  500.000000
9/6/2012	2:18:20 PM	BCl3 MFC set to  0.000000
9/6/2012	2:18:20 PM	PH3 MFC set to  0.000000
9/6/2012	2:18:20 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:18:20 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:18:20 PM	Tube furnace set to 750
9/6/2012	2:21:20 PM	H2 valve closed
9/6/2012	2:21:20 PM	BCl3 valve closed
9/6/2012	2:21:20 PM	PH3 valve closed
9/6/2012	2:21:20 PM	SiCl4 pre valve closed
9/6/2012	2:21:20 PM	SiCl4 post valve closed
9/6/2012	2:21:20 PM	Main Vac valve closed
9/6/2012	2:21:20 PM	Bypass valve closed
9/6/2012	2:21:20 PM	Helium valve opened
9/6/2012	2:21:20 PM	Bubbler valve opened
9/6/2012	2:21:20 PM	Helium MFC set to  400.000000
9/6/2012	2:21:20 PM	H2 MFC set to  0.000000
9/6/2012	2:21:20 PM	BCl3 MFC set to  0.000000
9/6/2012	2:21:20 PM	PH3 MFC set to  0.000000
9/6/2012	2:21:20 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:21:20 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:21:20 PM	Tube furnace set to 0
9/6/2012	2:46:20 PM	Helium valve closed
9/6/2012	2:46:20 PM	H2 valve closed
9/6/2012	2:46:20 PM	BCl3 valve closed
9/6/2012	2:46:20 PM	PH3 valve closed
9/6/2012	2:46:20 PM	SiCl4 pre valve closed
9/6/2012	2:46:20 PM	SiCl4 post valve closed
9/6/2012	2:46:20 PM	Main Vac valve closed
9/6/2012	2:46:20 PM	Bypass valve closed
9/6/2012	2:46:20 PM	Bubbler valve closed
9/6/2012	2:46:20 PM	Helium MFC set to  0.000000
9/6/2012	2:46:20 PM	H2 MFC set to  0.000000
9/6/2012	2:46:20 PM	BCl3 MFC set to  0.000000
9/6/2012	2:46:20 PM	PH3 MFC set to  0.000000
9/6/2012	2:46:20 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:46:20 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:46:20 PM	Tube furnace set to 50
9/6/2012	2:49:01 PM	Run aborted at 2:49 PM
9/6/2012	2:49:01 PM	Helium valve closed
9/6/2012	2:49:01 PM	H2 valve closed
9/6/2012	2:49:01 PM	BCl3 valve closed
9/6/2012	2:49:01 PM	PH3 valve closed
9/6/2012	2:49:01 PM	SiCl4 pre valve closed
9/6/2012	2:49:01 PM	SiCl4 post valve closed
9/6/2012	2:49:01 PM	Bypass valve closed
9/6/2012	2:49:01 PM	Main Vac valve closed
9/6/2012	2:49:01 PM	Bubbler valve closed
9/6/2012	2:49:01 PM	Helium MFC set to  0.000000
9/6/2012	2:49:01 PM	H2 MFC set to  0.000000
9/6/2012	2:49:01 PM	BCl3 MFC set to  0.000000
9/6/2012	2:49:01 PM	PH3 MFC set to  0.000000
9/6/2012	2:49:01 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:49:01 PM	Tube furnace set to 0
9/6/2012	2:52:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/6/2012	2:52:18 PM	Recipe started at 2:52 PM
9/6/2012	2:52:18 PM	Helium valve closed
9/6/2012	2:52:18 PM	H2 valve closed
9/6/2012	2:52:18 PM	BCl3 valve closed
9/6/2012	2:52:18 PM	PH3 valve closed
9/6/2012	2:52:18 PM	SiCl4 pre valve closed
9/6/2012	2:52:18 PM	SiCl4 post valve closed
9/6/2012	2:52:18 PM	Main Vac valve closed
9/6/2012	2:52:18 PM	Bubbler valve closed
9/6/2012	2:52:18 PM	Bypass valve opened
9/6/2012	2:52:18 PM	Helium MFC set to  0.000000
9/6/2012	2:52:18 PM	H2 MFC set to  0.000000
9/6/2012	2:52:18 PM	BCl3 MFC set to  0.000000
9/6/2012	2:52:18 PM	PH3 MFC set to  0.000000
9/6/2012	2:52:18 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:52:18 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:52:18 PM	Tube furnace set to 0
9/6/2012	2:53:32 PM	Helium valve closed
9/6/2012	2:53:32 PM	H2 valve closed
9/6/2012	2:53:32 PM	BCl3 valve closed
9/6/2012	2:53:32 PM	PH3 valve closed
9/6/2012	2:53:32 PM	SiCl4 pre valve closed
9/6/2012	2:53:32 PM	SiCl4 post valve closed
9/6/2012	2:53:32 PM	Main Vac valve closed
9/6/2012	2:53:32 PM	Bubbler valve closed
9/6/2012	2:53:32 PM	Bypass valve opened
9/6/2012	2:53:32 PM	Helium MFC set to  0.000000
9/6/2012	2:53:32 PM	H2 MFC set to  0.000000
9/6/2012	2:53:32 PM	BCl3 MFC set to  0.000000
9/6/2012	2:53:32 PM	PH3 MFC set to  0.000000
9/6/2012	2:53:32 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:53:32 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:53:32 PM	Tube furnace set to 0
9/6/2012	2:53:47 PM	Run aborted at 2:53 PM
9/6/2012	2:53:47 PM	Helium valve closed
9/6/2012	2:53:47 PM	H2 valve closed
9/6/2012	2:53:47 PM	BCl3 valve closed
9/6/2012	2:53:47 PM	PH3 valve closed
9/6/2012	2:53:47 PM	SiCl4 pre valve closed
9/6/2012	2:53:47 PM	SiCl4 post valve closed
9/6/2012	2:53:47 PM	Bypass valve closed
9/6/2012	2:53:47 PM	Main Vac valve closed
9/6/2012	2:53:47 PM	Bubbler valve closed
9/6/2012	2:53:47 PM	Helium MFC set to  0.000000
9/6/2012	2:53:47 PM	H2 MFC set to  0.000000
9/6/2012	2:53:47 PM	BCl3 MFC set to  0.000000
9/6/2012	2:53:47 PM	PH3 MFC set to  0.000000
9/6/2012	2:53:47 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:53:47 PM	Tube furnace set to 0
9/6/2012	2:53:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/6/2012	2:54:21 PM	Main Vac valve opened
9/6/2012	2:55:21 PM	Recipe started at 2:55 PM
9/6/2012	2:55:21 PM	Helium valve closed
9/6/2012	2:55:21 PM	H2 valve closed
9/6/2012	2:55:21 PM	BCl3 valve closed
9/6/2012	2:55:21 PM	PH3 valve closed
9/6/2012	2:55:21 PM	SiCl4 pre valve closed
9/6/2012	2:55:21 PM	SiCl4 post valve closed
9/6/2012	2:55:21 PM	Bypass valve closed
9/6/2012	2:55:21 PM	Bubbler valve closed
9/6/2012	2:55:21 PM	Main Vac valve opened
9/6/2012	2:55:21 PM	Helium MFC set to  0.000000
9/6/2012	2:55:21 PM	H2 MFC set to  0.000000
9/6/2012	2:55:21 PM	BCl3 MFC set to  0.000000
9/6/2012	2:55:21 PM	PH3 MFC set to  0.000000
9/6/2012	2:55:21 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:55:21 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:55:21 PM	Tube furnace set to 150
9/6/2012	2:55:51 PM	H2 valve closed
9/6/2012	2:55:51 PM	BCl3 valve closed
9/6/2012	2:55:51 PM	PH3 valve closed
9/6/2012	2:55:51 PM	SiCl4 pre valve closed
9/6/2012	2:55:51 PM	SiCl4 post valve closed
9/6/2012	2:55:51 PM	Bypass valve closed
9/6/2012	2:55:51 PM	Bubbler valve closed
9/6/2012	2:55:51 PM	Helium valve opened
9/6/2012	2:55:51 PM	Main Vac valve opened
9/6/2012	2:55:51 PM	Helium MFC set to  20.000000
9/6/2012	2:55:51 PM	H2 MFC set to  0.000000
9/6/2012	2:55:51 PM	BCl3 MFC set to  0.000000
9/6/2012	2:55:51 PM	PH3 MFC set to  0.000000
9/6/2012	2:55:51 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:55:51 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:55:51 PM	Tube furnace set to 150
9/6/2012	2:56:22 PM	Helium valve closed
9/6/2012	2:56:22 PM	H2 valve closed
9/6/2012	2:56:22 PM	BCl3 valve closed
9/6/2012	2:56:22 PM	PH3 valve closed
9/6/2012	2:56:22 PM	SiCl4 pre valve closed
9/6/2012	2:56:22 PM	SiCl4 post valve closed
9/6/2012	2:56:22 PM	Bypass valve closed
9/6/2012	2:56:22 PM	Bubbler valve closed
9/6/2012	2:56:22 PM	Main Vac valve opened
9/6/2012	2:56:22 PM	Helium MFC set to  0.000000
9/6/2012	2:56:22 PM	H2 MFC set to  0.000000
9/6/2012	2:56:22 PM	BCl3 MFC set to  0.000000
9/6/2012	2:56:22 PM	PH3 MFC set to  0.000000
9/6/2012	2:56:22 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:56:22 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:56:22 PM	Tube furnace set to 150
9/6/2012	2:56:52 PM	H2 valve closed
9/6/2012	2:56:52 PM	BCl3 valve closed
9/6/2012	2:56:52 PM	PH3 valve closed
9/6/2012	2:56:52 PM	SiCl4 pre valve closed
9/6/2012	2:56:52 PM	SiCl4 post valve closed
9/6/2012	2:56:52 PM	Bypass valve closed
9/6/2012	2:56:52 PM	Bubbler valve closed
9/6/2012	2:56:52 PM	Helium valve opened
9/6/2012	2:56:52 PM	Main Vac valve opened
9/6/2012	2:56:52 PM	Helium MFC set to  20.000000
9/6/2012	2:56:52 PM	H2 MFC set to  0.000000
9/6/2012	2:56:52 PM	BCl3 MFC set to  0.000000
9/6/2012	2:56:52 PM	PH3 MFC set to  0.000000
9/6/2012	2:56:52 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:56:52 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:56:52 PM	Tube furnace set to 150
9/6/2012	2:57:22 PM	Helium valve closed
9/6/2012	2:57:22 PM	H2 valve closed
9/6/2012	2:57:22 PM	BCl3 valve closed
9/6/2012	2:57:22 PM	PH3 valve closed
9/6/2012	2:57:22 PM	SiCl4 pre valve closed
9/6/2012	2:57:22 PM	SiCl4 post valve closed
9/6/2012	2:57:22 PM	Bypass valve closed
9/6/2012	2:57:22 PM	Bubbler valve closed
9/6/2012	2:57:22 PM	Main Vac valve opened
9/6/2012	2:57:22 PM	Helium MFC set to  0.000000
9/6/2012	2:57:22 PM	H2 MFC set to  0.000000
9/6/2012	2:57:22 PM	BCl3 MFC set to  0.000000
9/6/2012	2:57:22 PM	PH3 MFC set to  0.000000
9/6/2012	2:57:22 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:57:22 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:57:22 PM	Tube furnace set to 150
9/6/2012	2:57:52 PM	H2 valve closed
9/6/2012	2:57:52 PM	BCl3 valve closed
9/6/2012	2:57:52 PM	PH3 valve closed
9/6/2012	2:57:52 PM	SiCl4 pre valve closed
9/6/2012	2:57:52 PM	SiCl4 post valve closed
9/6/2012	2:57:52 PM	Bypass valve closed
9/6/2012	2:57:52 PM	Bubbler valve closed
9/6/2012	2:57:52 PM	Helium valve opened
9/6/2012	2:57:52 PM	Main Vac valve opened
9/6/2012	2:57:52 PM	Helium MFC set to  20.000000
9/6/2012	2:57:52 PM	H2 MFC set to  0.000000
9/6/2012	2:57:52 PM	BCl3 MFC set to  0.000000
9/6/2012	2:57:52 PM	PH3 MFC set to  0.000000
9/6/2012	2:57:52 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:57:52 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:57:52 PM	Tube furnace set to 150
9/6/2012	2:58:22 PM	Helium valve closed
9/6/2012	2:58:22 PM	H2 valve closed
9/6/2012	2:58:22 PM	BCl3 valve closed
9/6/2012	2:58:22 PM	PH3 valve closed
9/6/2012	2:58:22 PM	SiCl4 pre valve closed
9/6/2012	2:58:22 PM	SiCl4 post valve closed
9/6/2012	2:58:22 PM	Bypass valve closed
9/6/2012	2:58:22 PM	Bubbler valve closed
9/6/2012	2:58:23 PM	Main Vac valve opened
9/6/2012	2:58:23 PM	Helium MFC set to  0.000000
9/6/2012	2:58:23 PM	H2 MFC set to  0.000000
9/6/2012	2:58:23 PM	BCl3 MFC set to  0.000000
9/6/2012	2:58:23 PM	PH3 MFC set to  0.000000
9/6/2012	2:58:23 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:58:23 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:58:23 PM	Tube furnace set to 150
9/6/2012	2:58:53 PM	H2 valve closed
9/6/2012	2:58:53 PM	BCl3 valve closed
9/6/2012	2:58:53 PM	PH3 valve closed
9/6/2012	2:58:53 PM	SiCl4 pre valve closed
9/6/2012	2:58:53 PM	SiCl4 post valve closed
9/6/2012	2:58:53 PM	Bypass valve closed
9/6/2012	2:58:53 PM	Bubbler valve closed
9/6/2012	2:58:53 PM	Helium valve opened
9/6/2012	2:58:53 PM	Main Vac valve opened
9/6/2012	2:58:53 PM	Helium MFC set to  20.000000
9/6/2012	2:58:53 PM	H2 MFC set to  0.000000
9/6/2012	2:58:53 PM	BCl3 MFC set to  0.000000
9/6/2012	2:58:53 PM	PH3 MFC set to  0.000000
9/6/2012	2:58:53 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:58:53 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:58:53 PM	Tube furnace set to 150
9/6/2012	2:59:23 PM	Helium valve closed
9/6/2012	2:59:23 PM	H2 valve closed
9/6/2012	2:59:23 PM	BCl3 valve closed
9/6/2012	2:59:23 PM	PH3 valve closed
9/6/2012	2:59:23 PM	SiCl4 pre valve closed
9/6/2012	2:59:23 PM	SiCl4 post valve closed
9/6/2012	2:59:23 PM	Bypass valve closed
9/6/2012	2:59:23 PM	Bubbler valve closed
9/6/2012	2:59:23 PM	Main Vac valve opened
9/6/2012	2:59:23 PM	Helium MFC set to  0.000000
9/6/2012	2:59:23 PM	H2 MFC set to  0.000000
9/6/2012	2:59:23 PM	BCl3 MFC set to  0.000000
9/6/2012	2:59:23 PM	PH3 MFC set to  0.000000
9/6/2012	2:59:23 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:59:23 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:59:23 PM	Tube furnace set to 150
9/6/2012	2:59:53 PM	H2 valve closed
9/6/2012	2:59:53 PM	BCl3 valve closed
9/6/2012	2:59:53 PM	PH3 valve closed
9/6/2012	2:59:53 PM	SiCl4 pre valve closed
9/6/2012	2:59:53 PM	SiCl4 post valve closed
9/6/2012	2:59:53 PM	Bypass valve closed
9/6/2012	2:59:53 PM	Bubbler valve closed
9/6/2012	2:59:53 PM	Helium valve opened
9/6/2012	2:59:53 PM	Main Vac valve opened
9/6/2012	2:59:53 PM	Helium MFC set to  20.000000
9/6/2012	2:59:53 PM	H2 MFC set to  0.000000
9/6/2012	2:59:53 PM	BCl3 MFC set to  0.000000
9/6/2012	2:59:53 PM	PH3 MFC set to  0.000000
9/6/2012	2:59:53 PM	SiCl4 MFC set to  0.000000
9/6/2012	2:59:53 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	2:59:53 PM	Tube furnace set to 150
9/6/2012	3:00:23 PM	Helium valve closed
9/6/2012	3:00:23 PM	H2 valve closed
9/6/2012	3:00:23 PM	BCl3 valve closed
9/6/2012	3:00:23 PM	PH3 valve closed
9/6/2012	3:00:23 PM	SiCl4 pre valve closed
9/6/2012	3:00:23 PM	SiCl4 post valve closed
9/6/2012	3:00:23 PM	Bypass valve closed
9/6/2012	3:00:23 PM	Bubbler valve closed
9/6/2012	3:00:23 PM	Main Vac valve opened
9/6/2012	3:00:23 PM	Helium MFC set to  0.000000
9/6/2012	3:00:23 PM	H2 MFC set to  0.000000
9/6/2012	3:00:23 PM	BCl3 MFC set to  0.000000
9/6/2012	3:00:23 PM	PH3 MFC set to  0.000000
9/6/2012	3:00:23 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:00:23 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:00:24 PM	Tube furnace set to 150
9/6/2012	3:00:54 PM	H2 valve closed
9/6/2012	3:00:54 PM	BCl3 valve closed
9/6/2012	3:00:54 PM	PH3 valve closed
9/6/2012	3:00:54 PM	SiCl4 pre valve closed
9/6/2012	3:00:54 PM	SiCl4 post valve closed
9/6/2012	3:00:54 PM	Bypass valve closed
9/6/2012	3:00:54 PM	Bubbler valve closed
9/6/2012	3:00:54 PM	Helium valve opened
9/6/2012	3:00:54 PM	Main Vac valve opened
9/6/2012	3:00:54 PM	Helium MFC set to  20.000000
9/6/2012	3:00:54 PM	H2 MFC set to  0.000000
9/6/2012	3:00:54 PM	BCl3 MFC set to  0.000000
9/6/2012	3:00:54 PM	PH3 MFC set to  0.000000
9/6/2012	3:00:54 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:00:54 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:00:54 PM	Tube furnace set to 150
9/6/2012	3:01:24 PM	Helium valve closed
9/6/2012	3:01:24 PM	H2 valve closed
9/6/2012	3:01:24 PM	BCl3 valve closed
9/6/2012	3:01:24 PM	PH3 valve closed
9/6/2012	3:01:24 PM	SiCl4 pre valve closed
9/6/2012	3:01:24 PM	SiCl4 post valve closed
9/6/2012	3:01:24 PM	Bypass valve closed
9/6/2012	3:01:24 PM	Bubbler valve closed
9/6/2012	3:01:24 PM	Main Vac valve opened
9/6/2012	3:01:24 PM	Helium MFC set to  0.000000
9/6/2012	3:01:24 PM	H2 MFC set to  0.000000
9/6/2012	3:01:24 PM	BCl3 MFC set to  0.000000
9/6/2012	3:01:24 PM	PH3 MFC set to  0.000000
9/6/2012	3:01:24 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:01:24 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:01:24 PM	Tube furnace set to 150
9/6/2012	3:01:54 PM	H2 valve closed
9/6/2012	3:01:54 PM	BCl3 valve closed
9/6/2012	3:01:54 PM	PH3 valve closed
9/6/2012	3:01:54 PM	SiCl4 pre valve closed
9/6/2012	3:01:54 PM	SiCl4 post valve closed
9/6/2012	3:01:54 PM	Bypass valve closed
9/6/2012	3:01:54 PM	Bubbler valve closed
9/6/2012	3:01:54 PM	Helium valve opened
9/6/2012	3:01:54 PM	Main Vac valve opened
9/6/2012	3:01:54 PM	Helium MFC set to  20.000000
9/6/2012	3:01:54 PM	H2 MFC set to  0.000000
9/6/2012	3:01:54 PM	BCl3 MFC set to  0.000000
9/6/2012	3:01:54 PM	PH3 MFC set to  0.000000
9/6/2012	3:01:54 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:01:54 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:01:54 PM	Tube furnace set to 150
9/6/2012	3:02:24 PM	Helium valve closed
9/6/2012	3:02:24 PM	H2 valve closed
9/6/2012	3:02:24 PM	BCl3 valve closed
9/6/2012	3:02:24 PM	PH3 valve closed
9/6/2012	3:02:24 PM	SiCl4 pre valve closed
9/6/2012	3:02:24 PM	SiCl4 post valve closed
9/6/2012	3:02:24 PM	Bypass valve closed
9/6/2012	3:02:24 PM	Bubbler valve closed
9/6/2012	3:02:24 PM	Main Vac valve opened
9/6/2012	3:02:24 PM	Helium MFC set to  0.000000
9/6/2012	3:02:24 PM	H2 MFC set to  0.000000
9/6/2012	3:02:24 PM	BCl3 MFC set to  0.000000
9/6/2012	3:02:24 PM	PH3 MFC set to  0.000000
9/6/2012	3:02:24 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:02:24 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:02:25 PM	Tube furnace set to 150
9/6/2012	3:02:55 PM	H2 valve closed
9/6/2012	3:02:55 PM	BCl3 valve closed
9/6/2012	3:02:55 PM	PH3 valve closed
9/6/2012	3:02:55 PM	SiCl4 pre valve closed
9/6/2012	3:02:55 PM	SiCl4 post valve closed
9/6/2012	3:02:55 PM	Bypass valve closed
9/6/2012	3:02:55 PM	Bubbler valve closed
9/6/2012	3:02:55 PM	Helium valve opened
9/6/2012	3:02:55 PM	Main Vac valve opened
9/6/2012	3:02:55 PM	Helium MFC set to  20.000000
9/6/2012	3:02:55 PM	H2 MFC set to  0.000000
9/6/2012	3:02:55 PM	BCl3 MFC set to  0.000000
9/6/2012	3:02:55 PM	PH3 MFC set to  0.000000
9/6/2012	3:02:55 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:02:55 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:02:55 PM	Tube furnace set to 150
9/6/2012	3:03:25 PM	Helium valve closed
9/6/2012	3:03:25 PM	H2 valve closed
9/6/2012	3:03:25 PM	BCl3 valve closed
9/6/2012	3:03:25 PM	PH3 valve closed
9/6/2012	3:03:25 PM	SiCl4 pre valve closed
9/6/2012	3:03:25 PM	SiCl4 post valve closed
9/6/2012	3:03:25 PM	Bypass valve closed
9/6/2012	3:03:25 PM	Bubbler valve closed
9/6/2012	3:03:25 PM	Main Vac valve opened
9/6/2012	3:03:25 PM	Helium MFC set to  0.000000
9/6/2012	3:03:25 PM	H2 MFC set to  0.000000
9/6/2012	3:03:25 PM	BCl3 MFC set to  0.000000
9/6/2012	3:03:25 PM	PH3 MFC set to  0.000000
9/6/2012	3:03:25 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:03:25 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:03:25 PM	Tube furnace set to 150
9/6/2012	3:03:55 PM	H2 valve closed
9/6/2012	3:03:55 PM	BCl3 valve closed
9/6/2012	3:03:55 PM	PH3 valve closed
9/6/2012	3:03:55 PM	SiCl4 pre valve closed
9/6/2012	3:03:55 PM	SiCl4 post valve closed
9/6/2012	3:03:55 PM	Bypass valve closed
9/6/2012	3:03:55 PM	Bubbler valve closed
9/6/2012	3:03:55 PM	Helium valve opened
9/6/2012	3:03:55 PM	Main Vac valve opened
9/6/2012	3:03:55 PM	Helium MFC set to  20.000000
9/6/2012	3:03:55 PM	H2 MFC set to  0.000000
9/6/2012	3:03:55 PM	BCl3 MFC set to  0.000000
9/6/2012	3:03:55 PM	PH3 MFC set to  0.000000
9/6/2012	3:03:55 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:03:55 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:03:55 PM	Tube furnace set to 150
9/6/2012	3:04:25 PM	Helium valve closed
9/6/2012	3:04:25 PM	H2 valve closed
9/6/2012	3:04:25 PM	BCl3 valve closed
9/6/2012	3:04:25 PM	PH3 valve closed
9/6/2012	3:04:25 PM	SiCl4 pre valve closed
9/6/2012	3:04:25 PM	SiCl4 post valve closed
9/6/2012	3:04:25 PM	Bypass valve closed
9/6/2012	3:04:25 PM	Bubbler valve closed
9/6/2012	3:04:25 PM	Main Vac valve opened
9/6/2012	3:04:25 PM	Helium MFC set to  0.000000
9/6/2012	3:04:25 PM	H2 MFC set to  0.000000
9/6/2012	3:04:25 PM	BCl3 MFC set to  0.000000
9/6/2012	3:04:25 PM	PH3 MFC set to  0.000000
9/6/2012	3:04:25 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:04:25 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:04:26 PM	Tube furnace set to 150
9/6/2012	3:04:56 PM	H2 valve closed
9/6/2012	3:04:56 PM	BCl3 valve closed
9/6/2012	3:04:56 PM	PH3 valve closed
9/6/2012	3:04:56 PM	SiCl4 pre valve closed
9/6/2012	3:04:56 PM	SiCl4 post valve closed
9/6/2012	3:04:56 PM	Bypass valve closed
9/6/2012	3:04:56 PM	Bubbler valve closed
9/6/2012	3:04:56 PM	Helium valve opened
9/6/2012	3:04:56 PM	Main Vac valve opened
9/6/2012	3:04:56 PM	Helium MFC set to  20.000000
9/6/2012	3:04:56 PM	H2 MFC set to  0.000000
9/6/2012	3:04:56 PM	BCl3 MFC set to  0.000000
9/6/2012	3:04:56 PM	PH3 MFC set to  0.000000
9/6/2012	3:04:56 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:04:56 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:04:56 PM	Tube furnace set to 150
9/6/2012	3:05:26 PM	Helium valve closed
9/6/2012	3:05:26 PM	H2 valve closed
9/6/2012	3:05:26 PM	BCl3 valve closed
9/6/2012	3:05:26 PM	PH3 valve closed
9/6/2012	3:05:26 PM	SiCl4 pre valve closed
9/6/2012	3:05:26 PM	SiCl4 post valve closed
9/6/2012	3:05:26 PM	Bypass valve closed
9/6/2012	3:05:26 PM	Bubbler valve closed
9/6/2012	3:05:26 PM	Main Vac valve opened
9/6/2012	3:05:26 PM	Helium MFC set to  0.000000
9/6/2012	3:05:26 PM	H2 MFC set to  0.000000
9/6/2012	3:05:26 PM	BCl3 MFC set to  0.000000
9/6/2012	3:05:26 PM	PH3 MFC set to  0.000000
9/6/2012	3:05:26 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:05:26 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:05:26 PM	Tube furnace set to 150
9/6/2012	3:05:27 PM	Run finished at 3:05 PM
9/6/2012	3:17:15 PM	Main Vac valve closed
9/6/2012	3:17:30 PM	Main Vac valve opened
9/6/2012	3:17:40 PM	Recipe started at 3:17 PM
9/6/2012	3:17:40 PM	Helium valve closed
9/6/2012	3:17:40 PM	H2 valve closed
9/6/2012	3:17:40 PM	BCl3 valve closed
9/6/2012	3:17:40 PM	PH3 valve closed
9/6/2012	3:17:40 PM	SiCl4 pre valve closed
9/6/2012	3:17:40 PM	SiCl4 post valve closed
9/6/2012	3:17:40 PM	Bypass valve closed
9/6/2012	3:17:40 PM	Bubbler valve closed
9/6/2012	3:17:40 PM	Main Vac valve opened
9/6/2012	3:17:40 PM	Helium MFC set to  0.000000
9/6/2012	3:17:40 PM	H2 MFC set to  0.000000
9/6/2012	3:17:40 PM	BCl3 MFC set to  0.000000
9/6/2012	3:17:40 PM	PH3 MFC set to  0.000000
9/6/2012	3:17:40 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:17:40 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:17:40 PM	Tube furnace set to 150
9/6/2012	3:18:10 PM	H2 valve closed
9/6/2012	3:18:10 PM	BCl3 valve closed
9/6/2012	3:18:10 PM	PH3 valve closed
9/6/2012	3:18:10 PM	SiCl4 pre valve closed
9/6/2012	3:18:10 PM	SiCl4 post valve closed
9/6/2012	3:18:10 PM	Bypass valve closed
9/6/2012	3:18:10 PM	Bubbler valve closed
9/6/2012	3:18:10 PM	Helium valve opened
9/6/2012	3:18:10 PM	Main Vac valve opened
9/6/2012	3:18:10 PM	Helium MFC set to  20.000000
9/6/2012	3:18:10 PM	H2 MFC set to  0.000000
9/6/2012	3:18:10 PM	BCl3 MFC set to  0.000000
9/6/2012	3:18:10 PM	PH3 MFC set to  0.000000
9/6/2012	3:18:10 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:18:10 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:18:10 PM	Tube furnace set to 150
9/6/2012	3:18:40 PM	Helium valve closed
9/6/2012	3:18:40 PM	H2 valve closed
9/6/2012	3:18:40 PM	BCl3 valve closed
9/6/2012	3:18:40 PM	PH3 valve closed
9/6/2012	3:18:40 PM	SiCl4 pre valve closed
9/6/2012	3:18:40 PM	SiCl4 post valve closed
9/6/2012	3:18:40 PM	Bypass valve closed
9/6/2012	3:18:40 PM	Bubbler valve closed
9/6/2012	3:18:40 PM	Main Vac valve opened
9/6/2012	3:18:40 PM	Helium MFC set to  0.000000
9/6/2012	3:18:40 PM	H2 MFC set to  0.000000
9/6/2012	3:18:40 PM	BCl3 MFC set to  0.000000
9/6/2012	3:18:40 PM	PH3 MFC set to  0.000000
9/6/2012	3:18:40 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:18:40 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:18:40 PM	Tube furnace set to 150
9/6/2012	3:19:10 PM	H2 valve closed
9/6/2012	3:19:10 PM	BCl3 valve closed
9/6/2012	3:19:10 PM	PH3 valve closed
9/6/2012	3:19:10 PM	SiCl4 pre valve closed
9/6/2012	3:19:10 PM	SiCl4 post valve closed
9/6/2012	3:19:10 PM	Bypass valve closed
9/6/2012	3:19:10 PM	Bubbler valve closed
9/6/2012	3:19:10 PM	Helium valve opened
9/6/2012	3:19:10 PM	Main Vac valve opened
9/6/2012	3:19:10 PM	Helium MFC set to  20.000000
9/6/2012	3:19:10 PM	H2 MFC set to  0.000000
9/6/2012	3:19:10 PM	BCl3 MFC set to  0.000000
9/6/2012	3:19:10 PM	PH3 MFC set to  0.000000
9/6/2012	3:19:10 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:19:10 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:19:11 PM	Tube furnace set to 150
9/6/2012	3:19:41 PM	Helium valve closed
9/6/2012	3:19:41 PM	H2 valve closed
9/6/2012	3:19:41 PM	BCl3 valve closed
9/6/2012	3:19:41 PM	PH3 valve closed
9/6/2012	3:19:41 PM	SiCl4 pre valve closed
9/6/2012	3:19:41 PM	SiCl4 post valve closed
9/6/2012	3:19:41 PM	Bypass valve closed
9/6/2012	3:19:41 PM	Bubbler valve closed
9/6/2012	3:19:41 PM	Main Vac valve opened
9/6/2012	3:19:41 PM	Helium MFC set to  0.000000
9/6/2012	3:19:41 PM	H2 MFC set to  0.000000
9/6/2012	3:19:41 PM	BCl3 MFC set to  0.000000
9/6/2012	3:19:41 PM	PH3 MFC set to  0.000000
9/6/2012	3:19:41 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:19:41 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:19:41 PM	Tube furnace set to 150
9/6/2012	3:20:11 PM	H2 valve closed
9/6/2012	3:20:11 PM	BCl3 valve closed
9/6/2012	3:20:11 PM	PH3 valve closed
9/6/2012	3:20:11 PM	SiCl4 pre valve closed
9/6/2012	3:20:11 PM	SiCl4 post valve closed
9/6/2012	3:20:11 PM	Bypass valve closed
9/6/2012	3:20:11 PM	Bubbler valve closed
9/6/2012	3:20:11 PM	Helium valve opened
9/6/2012	3:20:11 PM	Main Vac valve opened
9/6/2012	3:20:11 PM	Helium MFC set to  20.000000
9/6/2012	3:20:11 PM	H2 MFC set to  0.000000
9/6/2012	3:20:11 PM	BCl3 MFC set to  0.000000
9/6/2012	3:20:11 PM	PH3 MFC set to  0.000000
9/6/2012	3:20:11 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:20:11 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:20:11 PM	Tube furnace set to 150
9/6/2012	3:20:41 PM	Helium valve closed
9/6/2012	3:20:41 PM	H2 valve closed
9/6/2012	3:20:41 PM	BCl3 valve closed
9/6/2012	3:20:41 PM	PH3 valve closed
9/6/2012	3:20:41 PM	SiCl4 pre valve closed
9/6/2012	3:20:41 PM	SiCl4 post valve closed
9/6/2012	3:20:41 PM	Bypass valve closed
9/6/2012	3:20:41 PM	Bubbler valve closed
9/6/2012	3:20:41 PM	Main Vac valve opened
9/6/2012	3:20:41 PM	Helium MFC set to  0.000000
9/6/2012	3:20:41 PM	H2 MFC set to  0.000000
9/6/2012	3:20:41 PM	BCl3 MFC set to  0.000000
9/6/2012	3:20:41 PM	PH3 MFC set to  0.000000
9/6/2012	3:20:41 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:20:41 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:20:41 PM	Tube furnace set to 150
9/6/2012	3:21:11 PM	H2 valve closed
9/6/2012	3:21:11 PM	BCl3 valve closed
9/6/2012	3:21:11 PM	PH3 valve closed
9/6/2012	3:21:11 PM	SiCl4 pre valve closed
9/6/2012	3:21:11 PM	SiCl4 post valve closed
9/6/2012	3:21:11 PM	Bypass valve closed
9/6/2012	3:21:11 PM	Bubbler valve closed
9/6/2012	3:21:11 PM	Helium valve opened
9/6/2012	3:21:11 PM	Main Vac valve opened
9/6/2012	3:21:11 PM	Helium MFC set to  20.000000
9/6/2012	3:21:11 PM	H2 MFC set to  0.000000
9/6/2012	3:21:11 PM	BCl3 MFC set to  0.000000
9/6/2012	3:21:11 PM	PH3 MFC set to  0.000000
9/6/2012	3:21:11 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:21:11 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:21:12 PM	Tube furnace set to 150
9/6/2012	3:21:42 PM	Helium valve closed
9/6/2012	3:21:42 PM	H2 valve closed
9/6/2012	3:21:42 PM	BCl3 valve closed
9/6/2012	3:21:42 PM	PH3 valve closed
9/6/2012	3:21:42 PM	SiCl4 pre valve closed
9/6/2012	3:21:42 PM	SiCl4 post valve closed
9/6/2012	3:21:42 PM	Bypass valve closed
9/6/2012	3:21:42 PM	Bubbler valve closed
9/6/2012	3:21:42 PM	Main Vac valve opened
9/6/2012	3:21:42 PM	Helium MFC set to  0.000000
9/6/2012	3:21:42 PM	H2 MFC set to  0.000000
9/6/2012	3:21:42 PM	BCl3 MFC set to  0.000000
9/6/2012	3:21:42 PM	PH3 MFC set to  0.000000
9/6/2012	3:21:42 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:21:42 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:21:42 PM	Tube furnace set to 150
9/6/2012	3:22:12 PM	H2 valve closed
9/6/2012	3:22:12 PM	BCl3 valve closed
9/6/2012	3:22:12 PM	PH3 valve closed
9/6/2012	3:22:12 PM	SiCl4 pre valve closed
9/6/2012	3:22:12 PM	SiCl4 post valve closed
9/6/2012	3:22:12 PM	Bypass valve closed
9/6/2012	3:22:12 PM	Bubbler valve closed
9/6/2012	3:22:12 PM	Helium valve opened
9/6/2012	3:22:12 PM	Main Vac valve opened
9/6/2012	3:22:12 PM	Helium MFC set to  20.000000
9/6/2012	3:22:12 PM	H2 MFC set to  0.000000
9/6/2012	3:22:12 PM	BCl3 MFC set to  0.000000
9/6/2012	3:22:12 PM	PH3 MFC set to  0.000000
9/6/2012	3:22:12 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:22:12 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:22:12 PM	Tube furnace set to 150
9/6/2012	3:22:42 PM	Helium valve closed
9/6/2012	3:22:42 PM	H2 valve closed
9/6/2012	3:22:42 PM	BCl3 valve closed
9/6/2012	3:22:42 PM	PH3 valve closed
9/6/2012	3:22:42 PM	SiCl4 pre valve closed
9/6/2012	3:22:42 PM	SiCl4 post valve closed
9/6/2012	3:22:42 PM	Bypass valve closed
9/6/2012	3:22:42 PM	Bubbler valve closed
9/6/2012	3:22:42 PM	Main Vac valve opened
9/6/2012	3:22:42 PM	Helium MFC set to  0.000000
9/6/2012	3:22:42 PM	H2 MFC set to  0.000000
9/6/2012	3:22:42 PM	BCl3 MFC set to  0.000000
9/6/2012	3:22:42 PM	PH3 MFC set to  0.000000
9/6/2012	3:22:42 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:22:42 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:22:42 PM	Tube furnace set to 150
9/6/2012	3:23:12 PM	H2 valve closed
9/6/2012	3:23:12 PM	BCl3 valve closed
9/6/2012	3:23:12 PM	PH3 valve closed
9/6/2012	3:23:12 PM	SiCl4 pre valve closed
9/6/2012	3:23:12 PM	SiCl4 post valve closed
9/6/2012	3:23:12 PM	Bypass valve closed
9/6/2012	3:23:12 PM	Bubbler valve closed
9/6/2012	3:23:12 PM	Helium valve opened
9/6/2012	3:23:12 PM	Main Vac valve opened
9/6/2012	3:23:12 PM	Helium MFC set to  20.000000
9/6/2012	3:23:12 PM	H2 MFC set to  0.000000
9/6/2012	3:23:12 PM	BCl3 MFC set to  0.000000
9/6/2012	3:23:12 PM	PH3 MFC set to  0.000000
9/6/2012	3:23:12 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:23:12 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:23:13 PM	Tube furnace set to 150
9/6/2012	3:23:43 PM	Helium valve closed
9/6/2012	3:23:43 PM	H2 valve closed
9/6/2012	3:23:43 PM	BCl3 valve closed
9/6/2012	3:23:43 PM	PH3 valve closed
9/6/2012	3:23:43 PM	SiCl4 pre valve closed
9/6/2012	3:23:43 PM	SiCl4 post valve closed
9/6/2012	3:23:43 PM	Bypass valve closed
9/6/2012	3:23:43 PM	Bubbler valve closed
9/6/2012	3:23:43 PM	Main Vac valve opened
9/6/2012	3:23:43 PM	Helium MFC set to  0.000000
9/6/2012	3:23:43 PM	H2 MFC set to  0.000000
9/6/2012	3:23:43 PM	BCl3 MFC set to  0.000000
9/6/2012	3:23:43 PM	PH3 MFC set to  0.000000
9/6/2012	3:23:43 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:23:43 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:23:43 PM	Tube furnace set to 150
9/6/2012	3:24:13 PM	H2 valve closed
9/6/2012	3:24:13 PM	BCl3 valve closed
9/6/2012	3:24:13 PM	PH3 valve closed
9/6/2012	3:24:13 PM	SiCl4 pre valve closed
9/6/2012	3:24:13 PM	SiCl4 post valve closed
9/6/2012	3:24:13 PM	Bypass valve closed
9/6/2012	3:24:13 PM	Bubbler valve closed
9/6/2012	3:24:13 PM	Helium valve opened
9/6/2012	3:24:13 PM	Main Vac valve opened
9/6/2012	3:24:13 PM	Helium MFC set to  20.000000
9/6/2012	3:24:13 PM	H2 MFC set to  0.000000
9/6/2012	3:24:13 PM	BCl3 MFC set to  0.000000
9/6/2012	3:24:13 PM	PH3 MFC set to  0.000000
9/6/2012	3:24:13 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:24:13 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:24:13 PM	Tube furnace set to 150
9/6/2012	3:24:43 PM	Helium valve closed
9/6/2012	3:24:43 PM	H2 valve closed
9/6/2012	3:24:43 PM	BCl3 valve closed
9/6/2012	3:24:43 PM	PH3 valve closed
9/6/2012	3:24:43 PM	SiCl4 pre valve closed
9/6/2012	3:24:43 PM	SiCl4 post valve closed
9/6/2012	3:24:43 PM	Bypass valve closed
9/6/2012	3:24:43 PM	Bubbler valve closed
9/6/2012	3:24:43 PM	Main Vac valve opened
9/6/2012	3:24:43 PM	Helium MFC set to  0.000000
9/6/2012	3:24:43 PM	H2 MFC set to  0.000000
9/6/2012	3:24:43 PM	BCl3 MFC set to  0.000000
9/6/2012	3:24:43 PM	PH3 MFC set to  0.000000
9/6/2012	3:24:43 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:24:43 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:24:43 PM	Tube furnace set to 150
9/6/2012	3:25:13 PM	H2 valve closed
9/6/2012	3:25:13 PM	BCl3 valve closed
9/6/2012	3:25:13 PM	PH3 valve closed
9/6/2012	3:25:13 PM	SiCl4 pre valve closed
9/6/2012	3:25:13 PM	SiCl4 post valve closed
9/6/2012	3:25:13 PM	Bypass valve closed
9/6/2012	3:25:13 PM	Bubbler valve closed
9/6/2012	3:25:13 PM	Helium valve opened
9/6/2012	3:25:13 PM	Main Vac valve opened
9/6/2012	3:25:13 PM	Helium MFC set to  20.000000
9/6/2012	3:25:13 PM	H2 MFC set to  0.000000
9/6/2012	3:25:13 PM	BCl3 MFC set to  0.000000
9/6/2012	3:25:13 PM	PH3 MFC set to  0.000000
9/6/2012	3:25:13 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:25:13 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:25:13 PM	Tube furnace set to 150
9/6/2012	3:25:43 PM	Helium valve closed
9/6/2012	3:25:43 PM	H2 valve closed
9/6/2012	3:25:44 PM	BCl3 valve closed
9/6/2012	3:25:44 PM	PH3 valve closed
9/6/2012	3:25:44 PM	SiCl4 pre valve closed
9/6/2012	3:25:44 PM	SiCl4 post valve closed
9/6/2012	3:25:44 PM	Bypass valve closed
9/6/2012	3:25:44 PM	Bubbler valve closed
9/6/2012	3:25:44 PM	Main Vac valve opened
9/6/2012	3:25:44 PM	Helium MFC set to  0.000000
9/6/2012	3:25:44 PM	H2 MFC set to  0.000000
9/6/2012	3:25:44 PM	BCl3 MFC set to  0.000000
9/6/2012	3:25:44 PM	PH3 MFC set to  0.000000
9/6/2012	3:25:44 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:25:44 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:25:44 PM	Tube furnace set to 150
9/6/2012	3:26:14 PM	H2 valve closed
9/6/2012	3:26:14 PM	BCl3 valve closed
9/6/2012	3:26:14 PM	PH3 valve closed
9/6/2012	3:26:14 PM	SiCl4 pre valve closed
9/6/2012	3:26:14 PM	SiCl4 post valve closed
9/6/2012	3:26:14 PM	Bypass valve closed
9/6/2012	3:26:14 PM	Bubbler valve closed
9/6/2012	3:26:14 PM	Helium valve opened
9/6/2012	3:26:14 PM	Main Vac valve opened
9/6/2012	3:26:14 PM	Helium MFC set to  20.000000
9/6/2012	3:26:14 PM	H2 MFC set to  0.000000
9/6/2012	3:26:14 PM	BCl3 MFC set to  0.000000
9/6/2012	3:26:14 PM	PH3 MFC set to  0.000000
9/6/2012	3:26:14 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:26:14 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:26:14 PM	Tube furnace set to 150
9/6/2012	3:26:44 PM	Helium valve closed
9/6/2012	3:26:44 PM	H2 valve closed
9/6/2012	3:26:44 PM	BCl3 valve closed
9/6/2012	3:26:44 PM	PH3 valve closed
9/6/2012	3:26:44 PM	SiCl4 pre valve closed
9/6/2012	3:26:44 PM	SiCl4 post valve closed
9/6/2012	3:26:44 PM	Bypass valve closed
9/6/2012	3:26:44 PM	Bubbler valve closed
9/6/2012	3:26:44 PM	Main Vac valve opened
9/6/2012	3:26:44 PM	Helium MFC set to  0.000000
9/6/2012	3:26:44 PM	H2 MFC set to  0.000000
9/6/2012	3:26:44 PM	BCl3 MFC set to  0.000000
9/6/2012	3:26:44 PM	PH3 MFC set to  0.000000
9/6/2012	3:26:44 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:26:44 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:26:44 PM	Tube furnace set to 150
9/6/2012	3:27:14 PM	H2 valve closed
9/6/2012	3:27:14 PM	BCl3 valve closed
9/6/2012	3:27:14 PM	PH3 valve closed
9/6/2012	3:27:14 PM	SiCl4 pre valve closed
9/6/2012	3:27:14 PM	SiCl4 post valve closed
9/6/2012	3:27:14 PM	Bypass valve closed
9/6/2012	3:27:14 PM	Bubbler valve closed
9/6/2012	3:27:14 PM	Helium valve opened
9/6/2012	3:27:14 PM	Main Vac valve opened
9/6/2012	3:27:14 PM	Helium MFC set to  20.000000
9/6/2012	3:27:14 PM	H2 MFC set to  0.000000
9/6/2012	3:27:14 PM	BCl3 MFC set to  0.000000
9/6/2012	3:27:14 PM	PH3 MFC set to  0.000000
9/6/2012	3:27:14 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:27:14 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:27:14 PM	Tube furnace set to 150
9/6/2012	3:27:44 PM	Helium valve closed
9/6/2012	3:27:44 PM	H2 valve closed
9/6/2012	3:27:44 PM	BCl3 valve closed
9/6/2012	3:27:44 PM	PH3 valve closed
9/6/2012	3:27:44 PM	SiCl4 pre valve closed
9/6/2012	3:27:44 PM	SiCl4 post valve closed
9/6/2012	3:27:44 PM	Bypass valve closed
9/6/2012	3:27:44 PM	Bubbler valve closed
9/6/2012	3:27:44 PM	Main Vac valve opened
9/6/2012	3:27:44 PM	Helium MFC set to  0.000000
9/6/2012	3:27:44 PM	H2 MFC set to  0.000000
9/6/2012	3:27:44 PM	BCl3 MFC set to  0.000000
9/6/2012	3:27:44 PM	PH3 MFC set to  0.000000
9/6/2012	3:27:44 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:27:44 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:27:45 PM	Tube furnace set to 150
9/6/2012	3:27:46 PM	Run finished at 3:27 PM
9/6/2012	3:44:30 PM	Main Vac valve closed
9/6/2012	3:44:45 PM	Main Vac valve opened
9/6/2012	3:44:48 PM	Helium MFC set to  10.000000
9/6/2012	3:44:49 PM	Helium valve opened
9/6/2012	3:45:11 PM	Recipe started at 3:45 PM
9/6/2012	3:45:11 PM	Helium valve closed
9/6/2012	3:45:11 PM	H2 valve closed
9/6/2012	3:45:11 PM	BCl3 valve closed
9/6/2012	3:45:11 PM	PH3 valve closed
9/6/2012	3:45:11 PM	SiCl4 pre valve closed
9/6/2012	3:45:11 PM	SiCl4 post valve closed
9/6/2012	3:45:11 PM	Main Vac valve closed
9/6/2012	3:45:11 PM	Bypass valve closed
9/6/2012	3:45:11 PM	Bubbler valve closed
9/6/2012	3:45:11 PM	Helium MFC set to  0.000000
9/6/2012	3:45:11 PM	H2 MFC set to  0.000000
9/6/2012	3:45:11 PM	BCl3 MFC set to  0.000000
9/6/2012	3:45:11 PM	PH3 MFC set to  0.000000
9/6/2012	3:45:11 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:45:11 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:45:11 PM	Tube furnace set to 0
9/6/2012	3:45:14 PM	Helium valve closed
9/6/2012	3:45:14 PM	BCl3 valve closed
9/6/2012	3:45:14 PM	PH3 valve closed
9/6/2012	3:45:14 PM	SiCl4 pre valve closed
9/6/2012	3:45:14 PM	SiCl4 post valve closed
9/6/2012	3:45:14 PM	Main Vac valve closed
9/6/2012	3:45:14 PM	Bypass valve closed
9/6/2012	3:45:14 PM	Bubbler valve closed
9/6/2012	3:45:15 PM	H2 valve opened
9/6/2012	3:45:15 PM	Helium MFC set to  0.000000
9/6/2012	3:45:15 PM	H2 MFC set to  500.000000
9/6/2012	3:45:15 PM	BCl3 MFC set to  0.000000
9/6/2012	3:45:15 PM	PH3 MFC set to  0.000000
9/6/2012	3:45:15 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:45:15 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:45:15 PM	Tube furnace set to 50
9/6/2012	3:46:26 PM	Helium valve closed
9/6/2012	3:46:26 PM	BCl3 valve closed
9/6/2012	3:46:26 PM	PH3 valve closed
9/6/2012	3:46:26 PM	SiCl4 pre valve closed
9/6/2012	3:46:26 PM	SiCl4 post valve closed
9/6/2012	3:46:26 PM	Main Vac valve closed
9/6/2012	3:46:26 PM	Bypass valve closed
9/6/2012	3:46:26 PM	H2 valve opened
9/6/2012	3:46:26 PM	Bubbler valve opened
9/6/2012	3:46:26 PM	Helium MFC set to  0.000000
9/6/2012	3:46:26 PM	H2 MFC set to  500.000000
9/6/2012	3:46:26 PM	BCl3 MFC set to  0.000000
9/6/2012	3:46:26 PM	PH3 MFC set to  0.000000
9/6/2012	3:46:26 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:46:26 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:46:26 PM	Tube furnace set to 50
9/6/2012	3:46:27 PM	Helium valve closed
9/6/2012	3:46:27 PM	BCl3 valve closed
9/6/2012	3:46:27 PM	PH3 valve closed
9/6/2012	3:46:27 PM	SiCl4 pre valve closed
9/6/2012	3:46:27 PM	SiCl4 post valve closed
9/6/2012	3:46:27 PM	Main Vac valve closed
9/6/2012	3:46:27 PM	Bypass valve closed
9/6/2012	3:46:27 PM	H2 valve opened
9/6/2012	3:46:27 PM	Bubbler valve opened
9/6/2012	3:46:27 PM	Helium MFC set to  0.000000
9/6/2012	3:46:27 PM	H2 MFC set to  500.000000
9/6/2012	3:46:27 PM	BCl3 MFC set to  0.000000
9/6/2012	3:46:27 PM	PH3 MFC set to  0.000000
9/6/2012	3:46:27 PM	SiCl4 MFC set to  0.000000
9/6/2012	3:46:27 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	3:46:28 PM	Tube furnace set to 1000
9/6/2012	4:06:28 PM	Helium valve closed
9/6/2012	4:06:28 PM	BCl3 valve closed
9/6/2012	4:06:28 PM	PH3 valve closed
9/6/2012	4:06:28 PM	Main Vac valve closed
9/6/2012	4:06:28 PM	Bypass valve closed
9/6/2012	4:06:28 PM	H2 valve opened
9/6/2012	4:06:28 PM	SiCl4 pre valve opened
9/6/2012	4:06:28 PM	SiCl4 post valve opened
9/6/2012	4:06:28 PM	Bubbler valve opened
9/6/2012	4:06:28 PM	Helium MFC set to  0.000000
9/6/2012	4:06:28 PM	H2 MFC set to  500.000000
9/6/2012	4:06:28 PM	BCl3 MFC set to  0.000000
9/6/2012	4:06:28 PM	PH3 MFC set to  0.000000
9/6/2012	4:06:28 PM	SiCl4 MFC set to  50.000000
9/6/2012	4:06:28 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	4:06:28 PM	Tube furnace set to 1000
9/6/2012	4:26:28 PM	Helium valve closed
9/6/2012	4:26:28 PM	BCl3 valve closed
9/6/2012	4:26:28 PM	PH3 valve closed
9/6/2012	4:26:28 PM	SiCl4 pre valve closed
9/6/2012	4:26:28 PM	SiCl4 post valve closed
9/6/2012	4:26:28 PM	Main Vac valve closed
9/6/2012	4:26:28 PM	Bypass valve closed
9/6/2012	4:26:28 PM	H2 valve opened
9/6/2012	4:26:28 PM	Bubbler valve opened
9/6/2012	4:26:28 PM	Helium MFC set to  0.000000
9/6/2012	4:26:28 PM	H2 MFC set to  500.000000
9/6/2012	4:26:28 PM	BCl3 MFC set to  0.000000
9/6/2012	4:26:28 PM	PH3 MFC set to  0.000000
9/6/2012	4:26:28 PM	SiCl4 MFC set to  0.000000
9/6/2012	4:26:28 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	4:26:28 PM	Tube furnace set to 950
9/6/2012	4:29:28 PM	Helium valve closed
9/6/2012	4:29:28 PM	BCl3 valve closed
9/6/2012	4:29:28 PM	PH3 valve closed
9/6/2012	4:29:28 PM	SiCl4 pre valve closed
9/6/2012	4:29:28 PM	SiCl4 post valve closed
9/6/2012	4:29:28 PM	Main Vac valve closed
9/6/2012	4:29:28 PM	Bypass valve closed
9/6/2012	4:29:28 PM	H2 valve opened
9/6/2012	4:29:28 PM	Bubbler valve opened
9/6/2012	4:29:28 PM	Helium MFC set to  0.000000
9/6/2012	4:29:28 PM	H2 MFC set to  500.000000
9/6/2012	4:29:28 PM	BCl3 MFC set to  0.000000
9/6/2012	4:29:28 PM	PH3 MFC set to  0.000000
9/6/2012	4:29:28 PM	SiCl4 MFC set to  0.000000
9/6/2012	4:29:28 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	4:29:28 PM	Tube furnace set to 900
9/6/2012	4:32:28 PM	Helium valve closed
9/6/2012	4:32:28 PM	BCl3 valve closed
9/6/2012	4:32:28 PM	PH3 valve closed
9/6/2012	4:32:28 PM	SiCl4 pre valve closed
9/6/2012	4:32:28 PM	SiCl4 post valve closed
9/6/2012	4:32:28 PM	Main Vac valve closed
9/6/2012	4:32:28 PM	Bypass valve closed
9/6/2012	4:32:28 PM	H2 valve opened
9/6/2012	4:32:28 PM	Bubbler valve opened
9/6/2012	4:32:28 PM	Helium MFC set to  0.000000
9/6/2012	4:32:28 PM	H2 MFC set to  500.000000
9/6/2012	4:32:28 PM	BCl3 MFC set to  0.000000
9/6/2012	4:32:28 PM	PH3 MFC set to  0.000000
9/6/2012	4:32:28 PM	SiCl4 MFC set to  0.000000
9/6/2012	4:32:28 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	4:32:29 PM	Tube furnace set to 850
9/6/2012	4:35:29 PM	Helium valve closed
9/6/2012	4:35:29 PM	BCl3 valve closed
9/6/2012	4:35:29 PM	PH3 valve closed
9/6/2012	4:35:29 PM	SiCl4 pre valve closed
9/6/2012	4:35:29 PM	SiCl4 post valve closed
9/6/2012	4:35:29 PM	Main Vac valve closed
9/6/2012	4:35:29 PM	Bypass valve closed
9/6/2012	4:35:29 PM	H2 valve opened
9/6/2012	4:35:29 PM	Bubbler valve opened
9/6/2012	4:35:29 PM	Helium MFC set to  0.000000
9/6/2012	4:35:29 PM	H2 MFC set to  500.000000
9/6/2012	4:35:29 PM	BCl3 MFC set to  0.000000
9/6/2012	4:35:29 PM	PH3 MFC set to  0.000000
9/6/2012	4:35:29 PM	SiCl4 MFC set to  0.000000
9/6/2012	4:35:29 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	4:35:29 PM	Tube furnace set to 800
9/6/2012	4:38:29 PM	Helium valve closed
9/6/2012	4:38:29 PM	BCl3 valve closed
9/6/2012	4:38:29 PM	PH3 valve closed
9/6/2012	4:38:29 PM	SiCl4 pre valve closed
9/6/2012	4:38:29 PM	SiCl4 post valve closed
9/6/2012	4:38:29 PM	Main Vac valve closed
9/6/2012	4:38:29 PM	Bypass valve closed
9/6/2012	4:38:29 PM	H2 valve opened
9/6/2012	4:38:29 PM	Bubbler valve opened
9/6/2012	4:38:29 PM	Helium MFC set to  0.000000
9/6/2012	4:38:29 PM	H2 MFC set to  500.000000
9/6/2012	4:38:29 PM	BCl3 MFC set to  0.000000
9/6/2012	4:38:29 PM	PH3 MFC set to  0.000000
9/6/2012	4:38:29 PM	SiCl4 MFC set to  0.000000
9/6/2012	4:38:29 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	4:38:29 PM	Tube furnace set to 750
9/6/2012	4:41:29 PM	H2 valve closed
9/6/2012	4:41:29 PM	BCl3 valve closed
9/6/2012	4:41:29 PM	PH3 valve closed
9/6/2012	4:41:29 PM	SiCl4 pre valve closed
9/6/2012	4:41:29 PM	SiCl4 post valve closed
9/6/2012	4:41:29 PM	Main Vac valve closed
9/6/2012	4:41:29 PM	Bypass valve closed
9/6/2012	4:41:29 PM	Helium valve opened
9/6/2012	4:41:29 PM	Bubbler valve opened
9/6/2012	4:41:29 PM	Helium MFC set to  400.000000
9/6/2012	4:41:29 PM	H2 MFC set to  0.000000
9/6/2012	4:41:29 PM	BCl3 MFC set to  0.000000
9/6/2012	4:41:29 PM	PH3 MFC set to  0.000000
9/6/2012	4:41:29 PM	SiCl4 MFC set to  0.000000
9/6/2012	4:41:29 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	4:41:29 PM	Tube furnace set to 0
9/6/2012	5:06:29 PM	Helium valve closed
9/6/2012	5:06:29 PM	H2 valve closed
9/6/2012	5:06:29 PM	BCl3 valve closed
9/6/2012	5:06:29 PM	PH3 valve closed
9/6/2012	5:06:29 PM	SiCl4 pre valve closed
9/6/2012	5:06:29 PM	SiCl4 post valve closed
9/6/2012	5:06:29 PM	Main Vac valve closed
9/6/2012	5:06:29 PM	Bypass valve closed
9/6/2012	5:06:29 PM	Bubbler valve closed
9/6/2012	5:06:29 PM	Helium MFC set to  0.000000
9/6/2012	5:06:29 PM	H2 MFC set to  0.000000
9/6/2012	5:06:29 PM	BCl3 MFC set to  0.000000
9/6/2012	5:06:29 PM	PH3 MFC set to  0.000000
9/6/2012	5:06:29 PM	SiCl4 MFC set to  0.000000
9/6/2012	5:06:29 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	5:06:29 PM	Tube furnace set to 50
9/6/2012	5:11:29 PM	Helium valve closed
9/6/2012	5:11:29 PM	H2 valve closed
9/6/2012	5:11:29 PM	BCl3 valve closed
9/6/2012	5:11:29 PM	PH3 valve closed
9/6/2012	5:11:29 PM	SiCl4 pre valve closed
9/6/2012	5:11:29 PM	SiCl4 post valve closed
9/6/2012	5:11:29 PM	Main Vac valve closed
9/6/2012	5:11:29 PM	Bubbler valve closed
9/6/2012	5:11:29 PM	Bypass valve opened
9/6/2012	5:11:29 PM	Helium MFC set to  0.000000
9/6/2012	5:11:29 PM	H2 MFC set to  0.000000
9/6/2012	5:11:29 PM	BCl3 MFC set to  0.000000
9/6/2012	5:11:29 PM	PH3 MFC set to  0.000000
9/6/2012	5:11:29 PM	SiCl4 MFC set to  0.000000
9/6/2012	5:11:29 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	5:11:30 PM	Tube furnace set to 0
9/6/2012	5:12:33 PM	Helium valve closed
9/6/2012	5:12:33 PM	H2 valve closed
9/6/2012	5:12:33 PM	BCl3 valve closed
9/6/2012	5:12:33 PM	PH3 valve closed
9/6/2012	5:12:33 PM	SiCl4 pre valve closed
9/6/2012	5:12:33 PM	SiCl4 post valve closed
9/6/2012	5:12:33 PM	Bypass valve closed
9/6/2012	5:12:33 PM	Bubbler valve closed
9/6/2012	5:12:33 PM	Main Vac valve opened
9/6/2012	5:12:33 PM	Helium MFC set to  0.000000
9/6/2012	5:12:33 PM	H2 MFC set to  0.000000
9/6/2012	5:12:33 PM	BCl3 MFC set to  0.000000
9/6/2012	5:12:33 PM	PH3 MFC set to  0.000000
9/6/2012	5:12:33 PM	SiCl4 MFC set to  0.000000
9/6/2012	5:12:33 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	5:12:34 PM	Tube furnace set to 0
9/6/2012	5:12:35 PM	Run finished at 5:12 PM
9/6/2012	5:53:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/6/2012	5:53:41 PM	Recipe started at 5:53 PM
9/6/2012	5:53:41 PM	Helium valve closed
9/6/2012	5:53:41 PM	H2 valve closed
9/6/2012	5:53:41 PM	BCl3 valve closed
9/6/2012	5:53:41 PM	PH3 valve closed
9/6/2012	5:53:41 PM	SiCl4 pre valve closed
9/6/2012	5:53:41 PM	SiCl4 post valve closed
9/6/2012	5:53:41 PM	Main Vac valve closed
9/6/2012	5:53:41 PM	Bypass valve closed
9/6/2012	5:53:41 PM	Bubbler valve closed
9/6/2012	5:53:41 PM	Helium MFC set to  0.000000
9/6/2012	5:53:41 PM	H2 MFC set to  0.000000
9/6/2012	5:53:41 PM	BCl3 MFC set to  0.000000
9/6/2012	5:53:41 PM	PH3 MFC set to  0.000000
9/6/2012	5:53:41 PM	SiCl4 MFC set to  0.000000
9/6/2012	5:53:41 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	5:53:41 PM	Tube furnace set to 0
9/6/2012	5:53:44 PM	H2 valve closed
9/6/2012	5:53:44 PM	BCl3 valve closed
9/6/2012	5:53:44 PM	PH3 valve closed
9/6/2012	5:53:44 PM	SiCl4 pre valve closed
9/6/2012	5:53:44 PM	SiCl4 post valve closed
9/6/2012	5:53:44 PM	Main Vac valve closed
9/6/2012	5:53:44 PM	Bypass valve closed
9/6/2012	5:53:44 PM	Bubbler valve closed
9/6/2012	5:53:44 PM	Helium valve opened
9/6/2012	5:53:44 PM	Helium MFC set to  500.000000
9/6/2012	5:53:44 PM	H2 MFC set to  0.000000
9/6/2012	5:53:44 PM	BCl3 MFC set to  0.000000
9/6/2012	5:53:44 PM	PH3 MFC set to  0.000000
9/6/2012	5:53:44 PM	SiCl4 MFC set to  0.000000
9/6/2012	5:53:44 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	5:53:44 PM	Tube furnace set to 0
9/6/2012	5:54:57 PM	Helium valve closed
9/6/2012	5:54:57 PM	H2 valve closed
9/6/2012	5:54:57 PM	BCl3 valve closed
9/6/2012	5:54:57 PM	PH3 valve closed
9/6/2012	5:54:57 PM	SiCl4 pre valve closed
9/6/2012	5:54:57 PM	SiCl4 post valve closed
9/6/2012	5:54:57 PM	Main Vac valve closed
9/6/2012	5:54:57 PM	Bypass valve closed
9/6/2012	5:54:57 PM	Bubbler valve closed
9/6/2012	5:54:57 PM	Helium MFC set to  0.000000
9/6/2012	5:54:57 PM	H2 MFC set to  0.000000
9/6/2012	5:54:57 PM	BCl3 MFC set to  0.000000
9/6/2012	5:54:57 PM	PH3 MFC set to  0.000000
9/6/2012	5:54:57 PM	SiCl4 MFC set to  0.000000
9/6/2012	5:54:57 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	5:54:57 PM	Tube furnace set to 0
9/6/2012	5:54:58 PM	Run finished at 5:54 PM
9/6/2012	5:54:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/6/2012	5:58:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/6/2012	5:58:39 PM	Recipe started at 5:58 PM
9/6/2012	5:58:39 PM	Helium valve closed
9/6/2012	5:58:39 PM	H2 valve closed
9/6/2012	5:58:39 PM	BCl3 valve closed
9/6/2012	5:58:39 PM	PH3 valve closed
9/6/2012	5:58:39 PM	SiCl4 pre valve closed
9/6/2012	5:58:39 PM	SiCl4 post valve closed
9/6/2012	5:58:39 PM	Main Vac valve closed
9/6/2012	5:58:39 PM	Bubbler valve closed
9/6/2012	5:58:39 PM	Bypass valve opened
9/6/2012	5:58:39 PM	Helium MFC set to  0.000000
9/6/2012	5:58:39 PM	H2 MFC set to  0.000000
9/6/2012	5:58:39 PM	BCl3 MFC set to  0.000000
9/6/2012	5:58:39 PM	PH3 MFC set to  0.000000
9/6/2012	5:58:39 PM	SiCl4 MFC set to  0.000000
9/6/2012	5:58:39 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	5:58:39 PM	Tube furnace set to 0
9/6/2012	5:59:56 PM	Helium valve closed
9/6/2012	5:59:56 PM	H2 valve closed
9/6/2012	5:59:56 PM	BCl3 valve closed
9/6/2012	5:59:56 PM	PH3 valve closed
9/6/2012	5:59:56 PM	SiCl4 pre valve closed
9/6/2012	5:59:56 PM	SiCl4 post valve closed
9/6/2012	5:59:56 PM	Main Vac valve closed
9/6/2012	5:59:56 PM	Bubbler valve closed
9/6/2012	5:59:56 PM	Bypass valve opened
9/6/2012	5:59:56 PM	Helium MFC set to  0.000000
9/6/2012	5:59:56 PM	H2 MFC set to  0.000000
9/6/2012	5:59:56 PM	BCl3 MFC set to  0.000000
9/6/2012	5:59:56 PM	PH3 MFC set to  0.000000
9/6/2012	5:59:56 PM	SiCl4 MFC set to  0.000000
9/6/2012	5:59:56 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	5:59:57 PM	Tube furnace set to 0
9/6/2012	6:00:57 PM	Helium valve closed
9/6/2012	6:00:57 PM	H2 valve closed
9/6/2012	6:00:57 PM	BCl3 valve closed
9/6/2012	6:00:57 PM	PH3 valve closed
9/6/2012	6:00:57 PM	SiCl4 pre valve closed
9/6/2012	6:00:57 PM	SiCl4 post valve closed
9/6/2012	6:00:57 PM	Bypass valve closed
9/6/2012	6:00:57 PM	Bubbler valve closed
9/6/2012	6:00:57 PM	Main Vac valve opened
9/6/2012	6:00:57 PM	Helium MFC set to  0.000000
9/6/2012	6:00:57 PM	H2 MFC set to  0.000000
9/6/2012	6:00:57 PM	BCl3 MFC set to  0.000000
9/6/2012	6:00:57 PM	PH3 MFC set to  0.000000
9/6/2012	6:00:57 PM	SiCl4 MFC set to  0.000000
9/6/2012	6:00:57 PM	Bypass solenoid MFC set to  0.000000
9/6/2012	6:00:57 PM	Tube furnace set to 0
9/6/2012	6:00:58 PM	Run finished at 6:00 PM
9/6/2012	6:00:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
